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Topography measurement of micro structure by modulation-based method
Zhou, Yi1,2; Tang, Yan1; Liu, Junbo1; Deng, Qinyuan1,2; Cheng, Yiguang1; Hu, Song1
Source PublicationProceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
Volume9685Pages:968505
2016
Language英语
ISSN0277-786X
DOI10.1117/12.2243599
Indexed BySCI ; Ei
WOS IDWOS:000387429600005
SubtypeC
AbstractDimensional metrology for micro structure plays an important role in addressing quality issues and observing the performance of micro-fabricated products. Different from the traditional white-light interferometry approach, the modulation-based method is expected to measure topography of micro structure by the obtained modulation of each interferometry image. Through seeking the maximum modulation of every pixel respectively in Z direction, the method could obtain the corresponding height of individual pixel and finally get topography of the structure. Owing to the characteristic of modulation, the proposed method which is not influenced by the change of background light intensity caused by instable light source and different reflection index of the structure could be widely applied with high stability. The paper both illustrates the principle of this novel method and conducts the experiment to verify the feasibility. © 2016 SPIE.
KeywordInterferometry Light Sources Manufacture Materials Testing Microstructure Optical Devices Pixels Surface Measurement Topography
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8504
Collection微电子装备总体研究室(四室)
Affiliation1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
Recommended Citation
GB/T 7714
Zhou, Yi,Tang, Yan,Liu, Junbo,et al. Topography measurement of micro structure by modulation-based method[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:968505.
APA Zhou, Yi,Tang, Yan,Liu, Junbo,Deng, Qinyuan,Cheng, Yiguang,&Hu, Song.(2016).Topography measurement of micro structure by modulation-based method.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,968505.
MLA Zhou, Yi,et al."Topography measurement of micro structure by modulation-based method".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):968505.
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