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Topography measurement of micro structure by modulation-based method
Zhou, Yi1,2; Tang, Yan1; Liu, Junbo1; Deng, Qinyuan1,2; Cheng, Yiguang1; Hu, Song1
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
ISSN0277-786X
卷号9685页码:968505
文章类型C
摘要Dimensional metrology for micro structure plays an important role in addressing quality issues and observing the performance of micro-fabricated products. Different from the traditional white-light interferometry approach, the modulation-based method is expected to measure topography of micro structure by the obtained modulation of each interferometry image. Through seeking the maximum modulation of every pixel respectively in Z direction, the method could obtain the corresponding height of individual pixel and finally get topography of the structure. Owing to the characteristic of modulation, the proposed method which is not influenced by the change of background light intensity caused by instable light source and different reflection index of the structure could be widely applied with high stability. The paper both illustrates the principle of this novel method and conducts the experiment to verify the feasibility. © 2016 SPIE.
关键词Interferometry Light Sources Manufacture Materials Testing Microstructure Optical Devices Pixels Surface Measurement Topography
DOI10.1117/12.2243599
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429600005
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8504
专题微电子装备总体研究室(四室)
作者单位1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
推荐引用方式
GB/T 7714
Zhou, Yi,Tang, Yan,Liu, Junbo,et al. Topography measurement of micro structure by modulation-based method[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:968505.
APA Zhou, Yi,Tang, Yan,Liu, Junbo,Deng, Qinyuan,Cheng, Yiguang,&Hu, Song.(2016).Topography measurement of micro structure by modulation-based method.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,968505.
MLA Zhou, Yi,et al."Topography measurement of micro structure by modulation-based method".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):968505.
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