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Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene
Zhang, Man1; Deng, Qiling1; Shi, Lifang1; Pang, Hui1; Cao, Axiu1; Hu, Song1
Source PublicationJournal of Nanoscience and Nanotechnology
Volume16Issue:12Pages:12316-12320
2016
Language英语
ISSN1533-4880
DOI10.1166/jnn.2016.12970
SubtypeJ
AbstractWe proposed a method for fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on UV-curable thiol-ene polymer and via soft lithography which consisted of rigid structure layer and flexible substrate. An elastic film was firstly prepared as the flexible substrate and the thiol-ene prepolymer was then spin-coated onto the master mold with nanostructures. The flexible film was imprinted against the resistant layer to make a conformal contact. The thiol-ene formed a cross-linked polymer network after UV light treatment via "click chemistry" at ambient conditions and without inhabitation from oxygen or moisture. The hybrid stamp was achieved after releasing the mold. The rigid thiol-ene nanostructure had high-resolution due to excellent properties. The hybrid stamps, composed of rigid cross-linked thiol-ene features with sub-100 nm resolution on an elastic poly(dimethylsiloxane) (PDMS) substrate, were fabricated based on the new method. Copyright © 2016 American Scientific Publishers All rights reserved.
KeywordCuring Fabrication Microchannels Molds Nanoimprint Lithography Nanostructures Pulse Width Modulation Substrates Synthesis (Chemical)
Indexed BySCI ; Ei
WOS IDWOS:000387279100031
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8499
Collection微电子装备总体研究室(四室)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
Recommended Citation
GB/T 7714
Zhang, Man,Deng, Qiling,Shi, Lifang,et al. Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene[J]. Journal of Nanoscience and Nanotechnology,2016,16(12):12316-12320.
APA Zhang, Man,Deng, Qiling,Shi, Lifang,Pang, Hui,Cao, Axiu,&Hu, Song.(2016).Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene.Journal of Nanoscience and Nanotechnology,16(12),12316-12320.
MLA Zhang, Man,et al."Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene".Journal of Nanoscience and Nanotechnology 16.12(2016):12316-12320.
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