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Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene
Zhang, Man1; Deng, Qiling1; Shi, Lifang1; Pang, Hui1; Cao, Axiu1; Hu, Song1
2016
发表期刊Journal of Nanoscience and Nanotechnology
ISSN1533-4880
卷号16期号:12页码:12316-12320
文章类型J
摘要We proposed a method for fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on UV-curable thiol-ene polymer and via soft lithography which consisted of rigid structure layer and flexible substrate. An elastic film was firstly prepared as the flexible substrate and the thiol-ene prepolymer was then spin-coated onto the master mold with nanostructures. The flexible film was imprinted against the resistant layer to make a conformal contact. The thiol-ene formed a cross-linked polymer network after UV light treatment via "click chemistry" at ambient conditions and without inhabitation from oxygen or moisture. The hybrid stamp was achieved after releasing the mold. The rigid thiol-ene nanostructure had high-resolution due to excellent properties. The hybrid stamps, composed of rigid cross-linked thiol-ene features with sub-100 nm resolution on an elastic poly(dimethylsiloxane) (PDMS) substrate, were fabricated based on the new method. Copyright © 2016 American Scientific Publishers All rights reserved.
关键词Curing Fabrication Microchannels Molds Nanoimprint Lithography Nanostructures Pulse Width Modulation Substrates Synthesis (Chemical)
DOI10.1166/jnn.2016.12970
收录类别SCI ; Ei
语种英语
项目资助者National Nature Science Foundation of China [11174281, 61275061, 11074251]
WOS记录号WOS:000387279100031
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8499
专题微电子装备总体研究室(四室)
作者单位1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
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Zhang, Man,Deng, Qiling,Shi, Lifang,et al. Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene[J]. Journal of Nanoscience and Nanotechnology,2016,16(12):12316-12320.
APA Zhang, Man,Deng, Qiling,Shi, Lifang,Pang, Hui,Cao, Axiu,&Hu, Song.(2016).Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene.Journal of Nanoscience and Nanotechnology,16(12),12316-12320.
MLA Zhang, Man,et al."Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene".Journal of Nanoscience and Nanotechnology 16.12(2016):12316-12320.
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