| Nano-Focusing and Leveling System Based on Improved Phase Analysis | |
| Tang, Yan; He, Yu; Yang, Yong; Wang, Jian; Liu, Junbo; Yan, Wei | |
| 2016 | |
| 发表期刊 | IEEE Photonics Journal
 |
| ISSN | 1943-0655 |
| 卷号 | 8期号:2页码:7445932 |
| 文章类型 | J |
| 摘要 | A nano-focusing and leveling system (FLS) based on improved phase analysis is proposed to measure the wafer height in lithography. Different from traditional methods, this paper applies a grating-based mark to conduct the measurement according to the principle of the Moiré effect. The phase analysis is also improved based on the fringe frequency feature, which is quantitatively analyzed for the first time. As a result, the wafer height can be measured with nanoscale precision. Compared with the existing FLS, the proposed method can get higher precision. Both the simulations and experiments are carried out to verify the feasibility and accuracy of the proposed method. © 2009-2012 IEEE. |
| 关键词 | Molecular Physics Photonics |
| DOI | 10.1109/JPHOT.2016.2544543 |
| 收录类别 | SCI ; Ei |
| 语种 | 英语 |
| 项目资助者 | National Natural Science Foundation of China [61204114, 61274108] ; China Postdoctoral Science Foundation [2015M572473] |
| WOS记录号 | WOS:000388089100043 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ioe.ac.cn/handle/181551/8496 |
| 专题 | 微电子装备总体研究室（四室） |
| 作者单位 | State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China |
| 推荐引用方式 GB/T 7714 | Tang, Yan,He, Yu,Yang, Yong,et al. Nano-Focusing and Leveling System Based on Improved Phase Analysis[J]. IEEE Photonics Journal,2016,8(2):7445932. |
| APA | Tang, Yan,He, Yu,Yang, Yong,Wang, Jian,Liu, Junbo,&Yan, Wei.(2016).Nano-Focusing and Leveling System Based on Improved Phase Analysis.IEEE Photonics Journal,8(2),7445932. |
| MLA | Tang, Yan,et al."Nano-Focusing and Leveling System Based on Improved Phase Analysis".IEEE Photonics Journal 8.2(2016):7445932. |
| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| 2016-2041.pdf（603KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 请求全文 | |
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