Electrostatic repulsive out-of-plane actuator using conductive substrate
Wang, Weimin; Wang, Qiang; Ren, Hao; Ma, Wenying; Qiu, Chuankai; Chen, Zexiang; Fan, Bin
2016
发表期刊SCIENTIFIC REPORTS
ISSN2045-2322
卷号6
文章类型J
摘要A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping. Theoretical and simulated results show that the pseudo-three-layer actuator offers higher performance than the two-layer and three-layer actuators with regard to the two most important characteristics of actuators, namely, driving force and theoretical stroke. Given that the pseudo-three-layer actuator structure is compatible with both the parallel-plate actuators and these two types of repulsive actuators, a 19-element two-layer repulsive actuated deformable mirror is operated in pseudo-three-layer electrical connection mode. Theoretical and experimental results demonstrate that the pseudo-three-layer mode produces a larger displacement of 0-4.5 mu m for a dc driving voltage of 0-100 V, when compared with that in two-layer mode.
关键词Adaptive Optics Micromirror Translation Toolbox Matlab
DOI10.1038/srep35118
收录类别SCI
语种英语
项目资助者National Natural Science Foundation of China [11403029, 61071027] ; Youth Innovation Promotion Association CAS [2014346]
WOS记录号WOS:000392013500001
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8482
专题微细加工光学技术国家重点实验室(开放室)
作者单位1.[Wang, Weimin
2.Wang, Qiang
3.Qiu, Chuankai
4.Fan, Bin] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
5.[Ren, Hao] Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85281 USA
6.[Ma, Wenying] Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Peoples R China
7.[Chen, Zexiang] Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
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GB/T 7714
Wang, Weimin,Wang, Qiang,Ren, Hao,et al. Electrostatic repulsive out-of-plane actuator using conductive substrate[J]. SCIENTIFIC REPORTS,2016,6.
APA Wang, Weimin.,Wang, Qiang.,Ren, Hao.,Ma, Wenying.,Qiu, Chuankai.,...&Fan, Bin.(2016).Electrostatic repulsive out-of-plane actuator using conductive substrate.SCIENTIFIC REPORTS,6.
MLA Wang, Weimin,et al."Electrostatic repulsive out-of-plane actuator using conductive substrate".SCIENTIFIC REPORTS 6(2016).
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