| Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer | |
| Liu, Ling1; Liu, Kaipeng1; Zhao, Zeyu1; Wang, Changtao1; Gao, Ping1; Luo, Xiangang1 | |
| 2016 | |
| 发表期刊 | RSC Advances
 |
| ISSN | 2046-2069 |
| 卷号 | 6期号:98页码:95973-95978 |
| 文章类型 | J |
| 摘要 | In recent years, hyperlens technology has attracted more attention because of its function of magnification and demagnification. In this study, hyperlens demagnification imaging lithography was experimentally demonstrated with sub-diffraction resolution of about 55 nm line width and about 1.8 demagnification factor at 365 nm. The hyperlens was composed of multiple Ag/SiO2films and combined with a resist layer and a plasmonic Ag reflector. It was employed to project mask patterns to subwavelength images for nanolithography. It was found that the plasmonic reflector contributes remarkably to improving imaging contrast, fidelity and efficiency by inhibiting the negative influences from the radial electric field components in the resist region. Furthermore, discussions about imaging influences with geometrical parameters are also presented. © 2016 The Royal Society of Chemistry. |
| 关键词 | Diffraction Electric Field Effects Electric Fields Geometry Masks Plasmons Reflection Silver |
| DOI | 10.1039/c6ra17098f |
| 收录类别 | SCI ; Ei |
| 语种 | 英语 |
| 项目资助者 | 973 Program of China [2013CBA01700] ; Chinese Nature Science Grant [61138002, 61307013] |
| WOS记录号 | WOS:000385633100073 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ioe.ac.cn/handle/181551/8478 |
| 专题 | 微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P.O. Box 350, Chengdu 2.610209, China |
| 推荐引用方式 GB/T 7714 | Liu, Ling,Liu, Kaipeng,Zhao, Zeyu,et al. Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer[J]. RSC Advances,2016,6(98):95973-95978. |
| APA | Liu, Ling,Liu, Kaipeng,Zhao, Zeyu,Wang, Changtao,Gao, Ping,&Luo, Xiangang.(2016).Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer.RSC Advances,6(98),95973-95978. |
| MLA | Liu, Ling,et al."Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer".RSC Advances 6.98(2016):95973-95978. |
| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| 2016-2192.pdf（1410KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 请求全文 | |
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