Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer
Liu, Ling1; Liu, Kaipeng1; Zhao, Zeyu1; Wang, Changtao1; Gao, Ping1; Luo, Xiangang1
2016
发表期刊RSC Advances
ISSN2046-2069
卷号6期号:98页码:95973-95978
文章类型J
摘要In recent years, hyperlens technology has attracted more attention because of its function of magnification and demagnification. In this study, hyperlens demagnification imaging lithography was experimentally demonstrated with sub-diffraction resolution of about 55 nm line width and about 1.8 demagnification factor at 365 nm. The hyperlens was composed of multiple Ag/SiO2films and combined with a resist layer and a plasmonic Ag reflector. It was employed to project mask patterns to subwavelength images for nanolithography. It was found that the plasmonic reflector contributes remarkably to improving imaging contrast, fidelity and efficiency by inhibiting the negative influences from the radial electric field components in the resist region. Furthermore, discussions about imaging influences with geometrical parameters are also presented. © 2016 The Royal Society of Chemistry.
关键词Diffraction Electric Field Effects Electric Fields Geometry Masks Plasmons Reflection Silver
DOI10.1039/c6ra17098f
收录类别SCI ; Ei
语种英语
项目资助者973 Program of China [2013CBA01700] ; Chinese Nature Science Grant [61138002, 61307013]
WOS记录号WOS:000385633100073
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8478
专题微细加工光学技术国家重点实验室(开放室)
作者单位1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P.O. Box 350, Chengdu
2.610209, China
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GB/T 7714
Liu, Ling,Liu, Kaipeng,Zhao, Zeyu,et al. Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer[J]. RSC Advances,2016,6(98):95973-95978.
APA Liu, Ling,Liu, Kaipeng,Zhao, Zeyu,Wang, Changtao,Gao, Ping,&Luo, Xiangang.(2016).Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer.RSC Advances,6(98),95973-95978.
MLA Liu, Ling,et al."Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer".RSC Advances 6.98(2016):95973-95978.
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