Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods
Zhao, Zeyu1; Luo, Yunfei1; Yao, Na1; Zhang, Wei1; Wang, Changtao1; Gao, Ping1; Zhao, Chengwei1; Pu, Mingbo1; Luo, Xiangang1
2016
发表期刊Optics Express
ISSN1094-4088
卷号24期号:24页码:27115-27126
文章类型J
摘要Plasmonic lens imaging with some resolution enhancement methods are investigated in this paper, mainly by physical modeling and numerical simulations. The imaging model is based on the refined optical transfer function with extra reflection in imaging space and measured in variant magnetic and electric field components. The influences of structured light illumination and mask patterns' modifications are considered as well. As experimental demonstrations, L-shaped slits pattern with a half-pitch of 60 nm is successfully imaged with 50 nm air distance, by using plasmonic cavity lens lithography and off-axis illumination with 365 nm wavelength light. This study is believed to provide the model and methods for the design of high resolution plasmonic lens employed in nano lithography and optical storage etc. © 2016 Optical Society of America.
关键词Electric Fields Masks Nanolithography Numerical Methods Optical Transfer Function Plasmons Surface Plasmon Resonance
DOI10.1364/OE.24.027115
收录类别SCI ; Ei
语种英语
项目资助者974 Program of China [2013CBA01700] ; National Natural Science Funds [61138002, 61177013, 61575204]
WOS记录号WOS:000389468200007
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8476
专题微细加工光学技术国家重点实验室(开放室)
作者单位1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu
2.610209, China
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GB/T 7714
Zhao, Zeyu,Luo, Yunfei,Yao, Na,et al. Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods[J]. Optics Express,2016,24(24):27115-27126.
APA Zhao, Zeyu.,Luo, Yunfei.,Yao, Na.,Zhang, Wei.,Wang, Changtao.,...&Luo, Xiangang.(2016).Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods.Optics Express,24(24),27115-27126.
MLA Zhao, Zeyu,et al."Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods".Optics Express 24.24(2016):27115-27126.
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