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Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods
Zhao, Zeyu1; Luo, Yunfei1; Yao, Na1; Zhang, Wei1; Wang, Changtao1; Gao, Ping1; Zhao, Chengwei1; Pu, Mingbo1; Luo, Xiangang1
2016
Source PublicationOptics Express
ISSN1094-4088
Volume24Issue:24Pages:27115-27126
SubtypeJ
AbstractPlasmonic lens imaging with some resolution enhancement methods are investigated in this paper, mainly by physical modeling and numerical simulations. The imaging model is based on the refined optical transfer function with extra reflection in imaging space and measured in variant magnetic and electric field components. The influences of structured light illumination and mask patterns' modifications are considered as well. As experimental demonstrations, L-shaped slits pattern with a half-pitch of 60 nm is successfully imaged with 50 nm air distance, by using plasmonic cavity lens lithography and off-axis illumination with 365 nm wavelength light. This study is believed to provide the model and methods for the design of high resolution plasmonic lens employed in nano lithography and optical storage etc. © 2016 Optical Society of America.
KeywordElectric Fields Masks Nanolithography Numerical Methods Optical Transfer Function Plasmons Surface Plasmon Resonance
DOI10.1364/OE.24.027115
Indexed BySCI ; Ei
Language英语
Funding Organization974 Program of China [2013CBA01700] ; National Natural Science Funds [61138002, 61177013, 61575204]
WOS IDWOS:000389468200007
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8476
Collection微细加工光学技术国家重点实验室(开放室)
Affiliation1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu
2.610209, China
Recommended Citation
GB/T 7714
Zhao, Zeyu,Luo, Yunfei,Yao, Na,et al. Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods[J]. Optics Express,2016,24(24):27115-27126.
APA Zhao, Zeyu.,Luo, Yunfei.,Yao, Na.,Zhang, Wei.,Wang, Changtao.,...&Luo, Xiangang.(2016).Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods.Optics Express,24(24),27115-27126.
MLA Zhao, Zeyu,et al."Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods".Optics Express 24.24(2016):27115-27126.
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