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Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology
Zhong, Xianyun1; Hou, Xi1; Yang, Jinshan1
2016
发表期刊Proceedings of SPIE: Advances in X-Ray;EUV Optics and Components XI
ISSN0277-786X
卷号9963页码:99630M
文章类型C
摘要Nickel is the unique material in the X-ray telescopes. And it has the typical soft material characteristics with low hardness high surface damage and low stability of thermal. The traditional fabrication techniques are exposed to lots of problems, including great surface scratches, high sub-surface damage and poor surface roughness and so on. The current fabrication technology for the nickel aspheric mainly adopt the single point diamond turning(SPDT), which has lots of advantages such as high efficiency, ultra-precision surface figure, low sub-surface damage and so on. But the residual surface texture of SPDT will cause great scattering losses and fall far short from the requirement in the X-ray applications. This paper mainly investigates the magnetorheological finishing (MRF) techniques for the super-smooth processing on the nickel optics. Through the study of the MRF polishing techniques, we obtained the ideal super-smooth polishing technique based on the self-controlled MRF-fluid NS-1, and finished the high-precision surface figure lower than RMS 80 (λ=632.8nm) and super-smooth roughness lower than Ra 0.3nm on the plane reflector and roughness lower than Ra 0.4nm on the convex cone. The studying of the MRF techniques makes a great effort to the state-of-the-art nickel material processing level for the X-ray optical systems applications. © 2016 SPIE.
关键词Cones Finishing Magnetorheological Fluids Nickel Optical Systems Polishing Spacecraft Equipment Telescopes x Ray Optics
DOI10.1117/12.2237144
收录类别SCI ; Ei
语种英语
项目资助者The Society of Photo-Optical Instrumentation Engineers (SPIE)
WOS记录号WOS:000391364700011
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8463
专题超精密总体部
作者单位1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
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GB/T 7714
Zhong, Xianyun,Hou, Xi,Yang, Jinshan. Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology[J]. Proceedings of SPIE: Advances in X-Ray;EUV Optics and Components XI,2016,9963:99630M.
APA Zhong, Xianyun,Hou, Xi,&Yang, Jinshan.(2016).Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology.Proceedings of SPIE: Advances in X-Ray;EUV Optics and Components XI,9963,99630M.
MLA Zhong, Xianyun,et al."Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology".Proceedings of SPIE: Advances in X-Ray;EUV Optics and Components XI 9963(2016):99630M.
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