Knowledge Management System Of Institute of optics and electronics, CAS
| Large-scale absolute surface reconstruction | |
| Wu, Gao-Feng1,2; Quan, Hai-Yang1,2; Song, Wei-Hong1; Wu, Yong-Qian1 | |
| 2016 | |
| 发表期刊 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
 |
| ISSN | 0277-786X |
| 卷号 | 9684页码:96843L |
| 文章类型 | C |
| 摘要 | In order to realize large-scale absolute surface reconstruction, a generalized iterative optimization method for solving the three-flat problem is studied. First, the idea of model-based absolute surface reconstruction is proposed, which considers the problems of absolute surface reconstruction as inverse problems. Then we take the three-flat problems as an example, we introduced two generalized iterative optimization methods for three-flat model. Finally, by both simulation and experiment, it is concluded that the block SOR method with an optimal relaxation factor converges much faster and saves more computational costs and memory space without reducing accuracy. Both simulation and experimental results indicate that the proposed iterative optimization methods are effective for solving the three-flat problem with pixel-level spatial resolution and the measuring precision of two separate measurements is 0.6 nm rms, and the cross-check test result is 0.8 nm rms. It is concluded that the proposed method can correctly reconstruct absolute figures with high efficiency and pixel-level spatial resolution. © 2016 SPIE. |
| 关键词 | Image Resolution Interferometry Inverse Problems Iterative Methods Manufacture Optical Testing Pixels |
| DOI | 10.1117/12.2243603 |
| 收录类别 | SCI ; Ei |
| 语种 | 英语 |
| 项目资助者 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| WOS记录号 | WOS:000387429500129 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ioe.ac.cn/handle/181551/8462 |
| 专题 | 超精密总体部 |
| 作者单位 | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 2.610209, China 3. University of Chinese Academy of Sciences, Beijing 4.100049, China |
| 推荐引用方式 GB/T 7714 | Wu, Gao-Feng,Quan, Hai-Yang,Song, Wei-Hong,et al. Large-scale absolute surface reconstruction[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:96843L. |
| APA | Wu, Gao-Feng,Quan, Hai-Yang,Song, Wei-Hong,&Wu, Yong-Qian.(2016).Large-scale absolute surface reconstruction.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,96843L. |
| MLA | Wu, Gao-Feng,et al."Large-scale absolute surface reconstruction".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):96843L. |
| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| 2016-2152.pdf（601KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 请求全文 | |
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