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Large-scale absolute surface reconstruction
Wu, Gao-Feng1,2; Quan, Hai-Yang1,2; Song, Wei-Hong1; Wu, Yong-Qian1
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
ISSN0277-786X
卷号9684页码:96843L
文章类型C
摘要In order to realize large-scale absolute surface reconstruction, a generalized iterative optimization method for solving the three-flat problem is studied. First, the idea of model-based absolute surface reconstruction is proposed, which considers the problems of absolute surface reconstruction as inverse problems. Then we take the three-flat problems as an example, we introduced two generalized iterative optimization methods for three-flat model. Finally, by both simulation and experiment, it is concluded that the block SOR method with an optimal relaxation factor converges much faster and saves more computational costs and memory space without reducing accuracy. Both simulation and experimental results indicate that the proposed iterative optimization methods are effective for solving the three-flat problem with pixel-level spatial resolution and the measuring precision of two separate measurements is 0.6 nm rms, and the cross-check test result is 0.8 nm rms. It is concluded that the proposed method can correctly reconstruct absolute figures with high efficiency and pixel-level spatial resolution. © 2016 SPIE.
关键词Image Resolution Interferometry Inverse Problems Iterative Methods Manufacture Optical Testing Pixels
DOI10.1117/12.2243603
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429500129
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8462
专题超精密总体部
作者单位1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
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GB/T 7714
Wu, Gao-Feng,Quan, Hai-Yang,Song, Wei-Hong,et al. Large-scale absolute surface reconstruction[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:96843L.
APA Wu, Gao-Feng,Quan, Hai-Yang,Song, Wei-Hong,&Wu, Yong-Qian.(2016).Large-scale absolute surface reconstruction.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,96843L.
MLA Wu, Gao-Feng,et al."Large-scale absolute surface reconstruction".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):96843L.
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