Knowledge Management System Of Institute of optics and electronics, CAS
| Large-scale absolute surface reconstruction | |
| Wu, Gao-Feng1,2; Quan, Hai-Yang1,2; Song, Wei-Hong1; Wu, Yong-Qian1 | |
| 2016 | |
| Source Publication | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
 |
| ISSN | 0277-786X |
| Volume | 9684Pages:96843L |
| Subtype | C |
| Abstract | In order to realize large-scale absolute surface reconstruction, a generalized iterative optimization method for solving the three-flat problem is studied. First, the idea of model-based absolute surface reconstruction is proposed, which considers the problems of absolute surface reconstruction as inverse problems. Then we take the three-flat problems as an example, we introduced two generalized iterative optimization methods for three-flat model. Finally, by both simulation and experiment, it is concluded that the block SOR method with an optimal relaxation factor converges much faster and saves more computational costs and memory space without reducing accuracy. Both simulation and experimental results indicate that the proposed iterative optimization methods are effective for solving the three-flat problem with pixel-level spatial resolution and the measuring precision of two separate measurements is 0.6 nm rms, and the cross-check test result is 0.8 nm rms. It is concluded that the proposed method can correctly reconstruct absolute figures with high efficiency and pixel-level spatial resolution. © 2016 SPIE. |
| Keyword | Image Resolution Interferometry Inverse Problems Iterative Methods Manufacture Optical Testing Pixels |
| DOI | 10.1117/12.2243603 |
| Indexed By | SCI ; Ei |
| Language | 英语 |
| Funding Organization | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| WOS ID | WOS:000387429500129 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/8462 |
| Collection | 超精密总体部 |
| Affiliation | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 2.610209, China 3. University of Chinese Academy of Sciences, Beijing 4.100049, China |
| Recommended Citation GB/T 7714 | Wu, Gao-Feng,Quan, Hai-Yang,Song, Wei-Hong,et al. Large-scale absolute surface reconstruction[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:96843L. |
| APA | Wu, Gao-Feng,Quan, Hai-Yang,Song, Wei-Hong,&Wu, Yong-Qian.(2016).Large-scale absolute surface reconstruction.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,96843L. |
| MLA | Wu, Gao-Feng,et al."Large-scale absolute surface reconstruction".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):96843L. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2016-2152.pdf（601KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | Application Full Text | |
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