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Analysis of absolute flatness testing in sub-stitching interferometer
Jia, Xin1; Xu, Fuchao1; Xie, Weimin1; Xing, Tingwen1
2016
Source PublicationProceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
ISSN0277-786X
Volume9684Pages:968438
SubtypeC
AbstractSub-Aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. In the thousand level cleanroom, we establish a good environment system. Long time stability, temperature controlled at 22°±0.02°.The humidity and noise are controlled in a certain range. We establish a stitching system in the clean room. The vibration testing system is used to test the vibration. The air pressure testing system is also used. In the motion system, we control the tilt error no more than 4 second to reduce the error. The angle error can be tested by the autocollimator and double grating reading head. © 2016 SPIE.
KeywordAtmospheric Pressure Clean Rooms Errors Humidity Control Interferometers Manufacture Measurements Optical Testing
DOI10.1117/12.2243462
Indexed BySCI ; Ei
Language英语
Funding OrganizationChinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS IDWOS:000387429500116
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8461
Collection超精密总体部
Affiliation1. Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
Recommended Citation
GB/T 7714
Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Analysis of absolute flatness testing in sub-stitching interferometer[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968438.
APA Jia, Xin,Xu, Fuchao,Xie, Weimin,&Xing, Tingwen.(2016).Analysis of absolute flatness testing in sub-stitching interferometer.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968438.
MLA Jia, Xin,et al."Analysis of absolute flatness testing in sub-stitching interferometer".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968438.
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