IOE OpenIR  > 超精密总体部
Analysis of absolute flatness testing in sub-stitching interferometer
Jia, Xin1; Xu, Fuchao1; Xie, Weimin1; Xing, Tingwen1
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
ISSN0277-786X
卷号9684页码:968438
文章类型C
摘要Sub-Aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. In the thousand level cleanroom, we establish a good environment system. Long time stability, temperature controlled at 22°±0.02°.The humidity and noise are controlled in a certain range. We establish a stitching system in the clean room. The vibration testing system is used to test the vibration. The air pressure testing system is also used. In the motion system, we control the tilt error no more than 4 second to reduce the error. The angle error can be tested by the autocollimator and double grating reading head. © 2016 SPIE.
关键词Atmospheric Pressure Clean Rooms Errors Humidity Control Interferometers Manufacture Measurements Optical Testing
DOI10.1117/12.2243462
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429500116
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8461
专题超精密总体部
作者单位1. Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
推荐引用方式
GB/T 7714
Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Analysis of absolute flatness testing in sub-stitching interferometer[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968438.
APA Jia, Xin,Xu, Fuchao,Xie, Weimin,&Xing, Tingwen.(2016).Analysis of absolute flatness testing in sub-stitching interferometer.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968438.
MLA Jia, Xin,et al."Analysis of absolute flatness testing in sub-stitching interferometer".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968438.
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
2016-2150.pdf(610KB)期刊论文作者接受稿开放获取CC BY-NC-SA请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Jia, Xin]的文章
[Xu, Fuchao]的文章
[Xie, Weimin]的文章
百度学术
百度学术中相似的文章
[Jia, Xin]的文章
[Xu, Fuchao]的文章
[Xie, Weimin]的文章
必应学术
必应学术中相似的文章
[Jia, Xin]的文章
[Xu, Fuchao]的文章
[Xie, Weimin]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。