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Evaluating surface repeatability for interferometric measurement: A comparative study
Quan, Haiyang1,2; Xi, Hou1; Fan, Wu1
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
ISSN0277-786X
卷号9684页码:96842M
文章类型C
摘要The result of an interferometric surface figure measurement is a height map, from which single parametric descriptors (for example the RMS) or residual maps are the most commonly used methods for determining the measurement repeatability. An alternate technique based on a standard deviation matrix is used to better describe the variation among successive measurements. A standard deviation matrix is acquired by computing standard deviation of the height map pixel by pixel. Only one standard deviation matrix can provide a spatial description of the repeatability as well as parametric descriptors (for example the mean) of the standard deviation matrix. Comparative study on the evaluation of measurement repeatability among different methods is shown by both simulation and experiment. It seems that the standard deviation matrix method is more valid to detect the variation than other techniques in the measurement of surface figure. © 2016 SPIE.
关键词Manufacture Optical Testing Pixels Statistics Uncertainty Analysis
DOI10.1117/12.2243301
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429500094
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8460
专题超精密总体部
作者单位1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
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GB/T 7714
Quan, Haiyang,Xi, Hou,Fan, Wu. Evaluating surface repeatability for interferometric measurement: A comparative study[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:96842M.
APA Quan, Haiyang,Xi, Hou,&Fan, Wu.(2016).Evaluating surface repeatability for interferometric measurement: A comparative study.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,96842M.
MLA Quan, Haiyang,et al."Evaluating surface repeatability for interferometric measurement: A comparative study".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):96842M.
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