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Evaluating surface repeatability for interferometric measurement: A comparative study
Quan, Haiyang1,2; Xi, Hou1; Fan, Wu1
Source PublicationProceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
Volume9684Pages:96842M
2016
Language英语
ISSN0277-786X
DOI10.1117/12.2243301
SubtypeC
AbstractThe result of an interferometric surface figure measurement is a height map, from which single parametric descriptors (for example the RMS) or residual maps are the most commonly used methods for determining the measurement repeatability. An alternate technique based on a standard deviation matrix is used to better describe the variation among successive measurements. A standard deviation matrix is acquired by computing standard deviation of the height map pixel by pixel. Only one standard deviation matrix can provide a spatial description of the repeatability as well as parametric descriptors (for example the mean) of the standard deviation matrix. Comparative study on the evaluation of measurement repeatability among different methods is shown by both simulation and experiment. It seems that the standard deviation matrix method is more valid to detect the variation than other techniques in the measurement of surface figure. © 2016 SPIE.
KeywordManufacture Optical Testing Pixels Statistics Uncertainty Analysis
Indexed BySCI ; Ei
WOS IDWOS:000387429500094
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8460
Collection超精密总体部
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
Recommended Citation
GB/T 7714
Quan, Haiyang,Xi, Hou,Fan, Wu. Evaluating surface repeatability for interferometric measurement: A comparative study[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:96842M.
APA Quan, Haiyang,Xi, Hou,&Fan, Wu.(2016).Evaluating surface repeatability for interferometric measurement: A comparative study.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,96842M.
MLA Quan, Haiyang,et al."Evaluating surface repeatability for interferometric measurement: A comparative study".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):96842M.
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