| Influence of deposition parameters on residual stress of YbF3 thin film | |
| Zhang, Yao-Ping1; Fan, Jun-Qi1; Long, Guo-Yun1 | |
| 2016 | |
| Source Publication | Proceedings of SPIE: Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015
 |
| ISSN | 0277-786X |
| Volume | 9796Pages:97960N |
| Subtype | C |
| Abstract | YbF3was proposed as a substitute for ThF4in anti-reflection or reflection coatings for the infrared range, and the residual stress of YbF3thin film using APS plasma ion assisted deposition(PIAD) was studied. From the results, we found the anode voltage of PIAD has a large effect on the residual stress of YbF3thin film, and the refractive index of YbF3produced with PIAD was higher than without it, with a possible reason close to packing density. Finally, we produced multi-layer reflection coating on a 260mm diameter mono-crystalline silicon substrate. Its surface contour was approximately 0.240λ (λ = 632.8nm), and the absorption was lower than 200ppm, which can satisfy the practical requirement. © 2016 SPIE. |
| Keyword | Adaptive Optics Coatings Deposition Ion Beam Assisted depositIon Monocrystalline Silicon Reflective Coatings Refractive Index Residual Stresses Space Debris Sputtering |
| DOI | 10.1117/12.2228239 |
| Indexed By | SCI ; Ei |
| Language | 英语 |
| Funding Organization | Chinese Academy of Engineering ; Chinese Society for Optical Engineering ; National Natural Science Foundation of China |
| WOS ID | WOS:000374450700023 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/8452 |
| Collection | 自适应光学技术研究室（八室） |
| Affiliation | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China 2.The Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China |
| Recommended Citation GB/T 7714 | Zhang, Yao-Ping,Fan, Jun-Qi,Long, Guo-Yun. Influence of deposition parameters on residual stress of YbF3 thin film[J]. Proceedings of SPIE: Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015,2016,9796:97960N. |
| APA | Zhang, Yao-Ping,Fan, Jun-Qi,&Long, Guo-Yun.(2016).Influence of deposition parameters on residual stress of YbF3 thin film.Proceedings of SPIE: Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015,9796,97960N. |
| MLA | Zhang, Yao-Ping,et al."Influence of deposition parameters on residual stress of YbF3 thin film".Proceedings of SPIE: Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015 9796(2016):97960N. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2016-2181.pdf（539KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | Application Full Text | |
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