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基于白光显微干涉术的微纳结构三维形貌及其超分辨检测
周毅1,2
Subtype博士
Thesis Advisor胡松
2018-05-07
Degree Grantor中国科学院大学
Place of Conferral北京
Keyword表面形貌检测 时域调制度 相位纵向拼接 超分辨显微成像 宽光谱
Subject Area工程与技术科学基础学科
Document Type学位论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8309
Collection光电技术研究所博硕士论文
Affiliation1.中国科学院光电技术研究所
2.中国科学院大学
Recommended Citation
GB/T 7714
周毅. 基于白光显微干涉术的微纳结构三维形貌及其超分辨检测[D]. 北京. 中国科学院大学,2018.
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