IOE OpenIR  > 光电技术研究所博硕士论文
光刻中的自成像效应研究
刘俊伯1
Subtype博士
Thesis Advisor胡松 ; 高洪涛
2017-05-24
Degree Grantor中国科学院研究生院
Place of Conferral北京
Document Type学位论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8138
Collection光电技术研究所博硕士论文
Affiliation1.中国科学院光电技术研究所
2.中国科学院大学
Recommended Citation
GB/T 7714
刘俊伯. 光刻中的自成像效应研究[D]. 北京. 中国科学院研究生院,2017.
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光刻中的自成像效应研究.pdf(6753KB)学位论文 开放获取CC BY-NC-SAApplication Full Text
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