IOE OpenIR  > 光电技术研究所博硕士论文
离子束溅射制备Ta2O5/SiO2薄膜的应力特性研究
余琪1,2
Subtype硕士
Thesis Advisor官春林
2017-05
Degree Grantor中国科学院研究生院
Place of Conferral北京
Keyword薄膜应力 离子束溅射技术 光学薄膜 有限元分析
Subject Area光学
Document Type学位论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8136
Collection光电技术研究所博硕士论文
Affiliation1.中国科学院光电技术研究所
2.中国科学院大学
Recommended Citation
GB/T 7714
余琪. 离子束溅射制备Ta2O5/SiO2薄膜的应力特性研究[D]. 北京. 中国科学院研究生院,2017.
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