IOE OpenIR  > 光电技术研究所博硕士论文
高填充因子小孔径仿生复眼结构的制备技术研究
刘鑫
Subtype硕士
Thesis Advisor邓启凌
2017-05
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline光学工程
Keyword仿生复眼 微透镜阵列 小孔径 高填充因子 气压差
Abstract

生物复眼具有小眼孔径小、数量多且紧密排布在曲面基底上的结构特点,所以它的视场角大、时间分辨率高、对运动物体敏感性强、能量利用率高,这些优越的性能吸引了众多国内外学者对生物复眼进行研究和仿生。从结构上说生物复眼是分布在曲面基底上的高填充因子小孔径微透镜阵列结构,仿生难度较大,现有的制备方法难以同时满足高填充因子、小孔径、制备方法简便易行的要求。

本文提出了一套高填充因子小孔径仿生复眼结构的制备方法,该方法首先将光刻胶热熔法制作的小孔径微透镜阵列的填充因子提高到理论最大值,并以此为模板采用软刻蚀技术将微透镜阵列结构制作在聚合物弹性薄膜的表面上,然后利用薄膜两侧气压差将平面微透镜阵列结构拉伸为(凹形)曲面基底上的微透镜阵列结构,最后使用紫外固化胶填充凹形曲面弹性薄膜,固化后获得高填充因子小孔径的仿生复眼结构。

本文研究的主要内容包括:

(1)分析了生物复眼的结构特点和工作机理,并对仿生复眼的应用前景和制备方法进行了讨论。

(2)对仿生复眼结构的参数进行了设计,并分析了光刻胶热熔法制作微透镜阵列的工作机理和工艺过程,利用该方法制作了小眼孔径为26um、周期为30um、填充因子为68.1%的小孔径微透镜阵列。

(3)针对光刻胶热熔法制作微透镜阵列填充因子较低的情况,提出一种提高微透镜阵列填充因子、扩大可加工面形范围的方法,并对其实验机理、面形影响因素做了详细分析;然后使用该方法将微透镜阵列的小眼孔径由26um提高到30um、填充因子由68.1%提高到理论最大值90.6%,验证了该方法用于制作高填充因子小孔径微透镜阵列的可行性。

(4)针对曲面基底微透镜阵列难以制作的现状,提出一种制备仿生复眼结构的新方法——拓扑映射法,该方法利用气压差将平面微透镜阵列结构转为曲面基底上的仿生复眼结构,并且不同气压差下可以获得不同的曲面基底面形。首先,利用有限元分析软件ANSYS 15.0对弹性薄膜的受力形变情况进行分析,获得不同压力下弹性薄膜的位移云图,初步确定合适的内外气压差。然后,研究软刻蚀技术的工作机理及制作工艺,并利用该技术制备了表面带有微透镜阵列结构的聚合物弹性薄膜。最后,设计并搭建实验系统,利用拓扑映射法将平面微透镜阵列结构转为底面直径4mm、高度1.21mm、曲面基底上共有1.6万个小眼(孔径为30um)的仿生复眼结构。对仿生复眼结构的面形和成像效果进行了测试,结果表明,该方法制备的仿生复眼结构均匀性良好、面形光滑、成像清晰,验证了拓扑映射法制备仿生复眼结构的可行性。

Other Abstract

The biological compound eyes have many advantages of wild field of view, fast temporal resolution, high sensitivity to the moving objects and high energy utilization ratio. The bionic compound eyes have been widely applied to medical endoscopes, panoramic imaging, micro aircraft navigation, wearable devices, high-speed target capture and accurate guidance. But the existing fabrication methods of bionic compound eyes cannot meet all the requirements of high fill factor, small aperture and easily be achieved. Therefore, we present a fabrication method of high fill factor and small aperture bionic compound eyes. The bionic compound eyes structure fabricated by this method have wild field of view, small aperture, wide processing surface range and controllable curved substrate surface.

The main contents of this paper are as followed:

(1) The structure features and working mechanism of biological compound eyes, the application background and fabrication method of bionic compound eyes are analyzed in detail;

(2) The target parameters of bionic compound eyes are designed and then we fabricate micro-lens arrays with 26um small aperture using the traditional photoresist melting method;

(3) We propose a fabrication method of bionic compound eyes of high fill factor and wide processing surface range. Then we analyze the experimental mechanism and surface influence factors of this method. A series of experiments are carried to prove the feasibility of this method. After that, we fabricate the micro-lens arrays structure of small aperture with ommatidium aperture is 30um and high fill factor with 90.6%;

(4) We put forward a new fabrication method for of bionic compound eyes structure--topological mapping method and the experimental mechanism of this method was introduced. The three-dimensional model of elastic membrane was established and the stress analysis was carried out using the finite element analysis software ANSYS 15.0. Then we obtained the displacement of elastic film under different pressure and determine the appropriate gas pressure difference between membrane. After that, we  built the experiment system and fabricated elastic PDMS membrane with micro-lens arrays structure on it. At last, the bionic compound eyes structure was fabricated by topological mapping method. The measuring results shown that the bionic compound eyes have good uniformity, smooth surface and clear imaging.

Subject Area光学 ; 工程仿生学
Language中文
Document Type学位论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8118
Collection光电技术研究所博硕士论文
Affiliation1.中国科学院大学
2.中国科学院光电技术研究所
Recommended Citation
GB/T 7714
刘鑫. 高填充因子小孔径仿生复眼结构的制备技术研究[D]. 北京. 中国科学院研究生院,2017.
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