IOE OpenIR  > 光电技术研究所博硕士论文
泰伯光刻机Z向运动平台控制系统研究
姚靖威1,2
Subtype硕士
Thesis Advisor赵立新
2017-05-19
Degree Grantor中国科学院大学
Place of Conferral北京
Document Type学位论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8093
Collection光电技术研究所博硕士论文
Affiliation1.中国科学院大学
2.中国科学院光电技术研究所
Recommended Citation
GB/T 7714
姚靖威. 泰伯光刻机Z向运动平台控制系统研究[D]. 北京. 中国科学院大学,2017.
Files in This Item:
File Name/Size DocType Version Access License
泰伯光刻机Z向运动平台控制系统研究-姚靖(6018KB)学位论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[姚靖威]'s Articles
Baidu academic
Similar articles in Baidu academic
[姚靖威]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[姚靖威]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.