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Quantitative measurement of optical surfaces using an improved knife edge
Jing HongwEi; Yang WEi; Fan Bin; Wan Yongjian; Wu Shibin; Wu Fan; Fan Tianquan
Volume7283
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractOne of the oldest techniques for sensing optical abberations is Foucault knife edge test. Qualitative properties of knife edge test have been utilized over the past 150 years to assess the quality of an optic or optical system. Much work and analysis have been performed since Foucault,but no satisfactory results have been found. This paper describes a method that upgrades the knife edge tester from a qualitative tester to a quantitative tester.Firstly,the traditional knife edge tester is upgraded to an improved one enabling the knife to cut the focus from horizontal direction and vertical direction.Secondly,the 2 sets of shadows were integrated to form complete mirror shadows.Finally,a mathematical model is established to quantitatively evaluate the surface error from the shadows. An experiment has been done using the method. The calculated deviations of the optical surface are compared with the results measured by ZYGO interferometer. Two measurement results show resemblance.; One of the oldest techniques for sensing optical abberations is Foucault knife edge test. Qualitative properties of knife edge test have been utilized over the past 150 years to assess the quality of an optic or optical system. Much work and analysis have been performed since Foucault,but no satisfactory results have been found. This paper describes a method that upgrades the knife edge tester from a qualitative tester to a quantitative tester.Firstly,the traditional knife edge tester is upgraded to an improved one enabling the knife to cut the focus from horizontal direction and vertical direction.Secondly,the 2 sets of shadows were integrated to form complete mirror shadows.Finally,a mathematical model is established to quantitatively evaluate the surface error from the shadows. An experiment has been done using the method. The calculated deviations of the optical surface are compared with the results measured by ZYGO interferometer. Two measurement results show resemblance.
Conference NameProceedings of SPIE
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7931
Collection质量处(质检中心)
Corresponding AuthorJing HongwEi
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Jing HongwEi,Yang WEi,Fan Bin,et al. Quantitative measurement of optical surfaces using an improved knife edge[C],2009.
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2009-279.pdf(345KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
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