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Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor
Chen, Lin1,2; Jing, Hongwei1; Wei, Zhongwei1,2; Cao, Xuedong1
Volume9446
Pages944621
2015
Language英语
ISSN0277-786X
DOI10.1117/12.2180887
Indexed BySCI ; Ei
Subtype会议论文
AbstractA spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology. ©2015 SPIE.; A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology. ©2015 SPIE.
Conference NameProceedings of SPIE: 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014
Conference Date2015
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7929
Collection质量处(质检中心)
Corresponding AuthorChen, Lin
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O .Box 350, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Chen, Lin,Jing, Hongwei,Wei, Zhongwei,et al. Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor[C],2015:944621.
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