| Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor | |
| Chen, Lin1,2; Jing, Hongwei1; Wei, Zhongwei1,2; Cao, Xuedong1 | |
| Volume | 9446 |
| Pages | 944621 |
| 2015 | |
| Language | 英语 |
| ISSN | 0277-786X |
| DOI | 10.1117/12.2180887 |
| Indexed By | SCI ; Ei |
| Subtype | 会议论文 |
| Abstract | A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology. ©2015 SPIE.; A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology. ©2015 SPIE. |
| Conference Name | Proceedings of SPIE: 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014 |
| Conference Date | 2015 |
| Citation statistics | |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7929 |
| Collection | 质量处（质检中心） |
| Corresponding Author | Chen, Lin |
| Affiliation | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O .Box 350, Chengdu, China 2. University of Chinese Academy of Sciences, Beijing, China |
| Recommended Citation GB/T 7714 | Chen, Lin,Jing, Hongwei,Wei, Zhongwei,et al. Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor[C],2015:944621. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2015-2062.pdf（478KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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