| 题名: | Research on the measurement technology of effective arm length of swing arm profilometer |
| 作者: | Chen, Lin1,2; Jing, Hongwei1; Wei, Zhongwei1,2; Li, Jie1; Cao, Xuedong1
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| 出版日期: | 2014
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| 会议名称: | Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
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| 会议日期: | 2014
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| 学科分类: | Data handling - Manufacture - MATLAB - Mirrors - Optical testing - Probes - Profilometry - Telescopes
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| DOI: | 10.1117/12.2070673
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| 中文摘要: | When the swing arm profilometer(SAP) measuring the mirror, the effective arm length of SAP which haves an obvious influence on the measurement results of the mirror surface shape needs to be measured accurately. It requires the measurement uncertainty of the effective arm length to reach 10μm in order to meet the measurement requirements, in this paper, we present a kind of technology based on laser tracker to measure the effective arm length of SAP. When the swing arm rotates around the shaft axis of swing arm rotary stage, the probe and two laser tracker balls form three sections of circular arc around the shaft axis of swing arm rotary stage in space. Laser tracker tracks and measures the circular arcs of two laser tracker balls, the center coordinates of the circular plane of circular arc can be calculated by data processing. The linear equation that passes through the two center coordinates is the equation of the shaft axis of rotary stage, the vertical distance from the probe to the shaft axis of rotary stage which can be calculated refer to the equation from the point to the line is the effective arm length. After Matlab simulation, this measurement method can meet the measurement accuracy. © 2014 SPIE. |
| 英文摘要: | When the swing arm profilometer(SAP) measuring the mirror, the effective arm length of SAP which haves an obvious influence on the measurement results of the mirror surface shape needs to be measured accurately. It requires the measurement uncertainty of the effective arm length to reach 10μm in order to meet the measurement requirements, in this paper, we present a kind of technology based on laser tracker to measure the effective arm length of SAP. When the swing arm rotates around the shaft axis of swing arm rotary stage, the probe and two laser tracker balls form three sections of circular arc around the shaft axis of swing arm rotary stage in space. Laser tracker tracks and measures the circular arcs of two laser tracker balls, the center coordinates of the circular plane of circular arc can be calculated by data processing. The linear equation that passes through the two center coordinates is the equation of the shaft axis of rotary stage, the vertical distance from the probe to the shaft axis of rotary stage which can be calculated refer to the equation from the point to the line is the effective arm length. After Matlab simulation, this measurement method can meet the measurement accuracy. © 2014 SPIE. |
| 收录类别: | Ei
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| 语种: | 英语
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| 卷号: | 9280
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| ISSN号: | 0277786X
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| 文章类型: | 会议论文
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| 页码: | 92800P
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| Citation statistics: |
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7926
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| Appears in Collections: | 质量处（质检中心）_会议论文
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| 2014-2119.pdf（430KB） | 会议论文 | -- | 限制开放 | | View
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作者单位: | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China
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| Recommended Citation: | |
Chen, Lin,Jing, Hongwei,Wei, Zhongwei,et al. Research on the measurement technology of effective arm length of swing arm profilometer[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes. 2014.
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