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Research on the measurement technology of effective arm length of swing arm profilometer
Chen, Lin1,2; Jing, Hongwei1; Wei, Zhongwei1,2; Li, Jie1; Cao, Xuedong1
Volume9280
Pages92800P
2014
Language英语
ISSN0277786X
DOI10.1117/12.2070673
Indexed ByEi
Subtype会议论文
AbstractWhen the swing arm profilometer(SAP) measuring the mirror, the effective arm length of SAP which haves an obvious influence on the measurement results of the mirror surface shape needs to be measured accurately. It requires the measurement uncertainty of the effective arm length to reach 10μm in order to meet the measurement requirements, in this paper, we present a kind of technology based on laser tracker to measure the effective arm length of SAP. When the swing arm rotates around the shaft axis of swing arm rotary stage, the probe and two laser tracker balls form three sections of circular arc around the shaft axis of swing arm rotary stage in space. Laser tracker tracks and measures the circular arcs of two laser tracker balls, the center coordinates of the circular plane of circular arc can be calculated by data processing. The linear equation that passes through the two center coordinates is the equation of the shaft axis of rotary stage, the vertical distance from the probe to the shaft axis of rotary stage which can be calculated refer to the equation from the point to the line is the effective arm length. After Matlab simulation, this measurement method can meet the measurement accuracy. © 2014 SPIE.; When the swing arm profilometer(SAP) measuring the mirror, the effective arm length of SAP which haves an obvious influence on the measurement results of the mirror surface shape needs to be measured accurately. It requires the measurement uncertainty of the effective arm length to reach 10μm in order to meet the measurement requirements, in this paper, we present a kind of technology based on laser tracker to measure the effective arm length of SAP. When the swing arm rotates around the shaft axis of swing arm rotary stage, the probe and two laser tracker balls form three sections of circular arc around the shaft axis of swing arm rotary stage in space. Laser tracker tracks and measures the circular arcs of two laser tracker balls, the center coordinates of the circular plane of circular arc can be calculated by data processing. The linear equation that passes through the two center coordinates is the equation of the shaft axis of rotary stage, the vertical distance from the probe to the shaft axis of rotary stage which can be calculated refer to the equation from the point to the line is the effective arm length. After Matlab simulation, this measurement method can meet the measurement accuracy. © 2014 SPIE.
Conference NameProceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
Conference Date2014
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7926
Collection质量处(质检中心)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Chen, Lin,Jing, Hongwei,Wei, Zhongwei,et al. Research on the measurement technology of effective arm length of swing arm profilometer[C],2014:92800P.
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