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题名:
Error separation technique for measuring aspheric surface based on dual probes
作者: Wei, Zhong-Wei1,2; Jing, Hong-Wei1; Kuang, Long1; Wu, Shi-Bin1
出版日期: 2013
会议名称: Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications
会议日期: 2013
学科分类: Bearings (machine parts) - Least squares approximations - Optical testing - Probes - Profilometry
DOI: 10.1117/12.2034649
中文摘要: In this paper, we present an error separation method based on dual probes for the swing arm profilometer to calibrate the rotary table errors. Two probes and the rotation axis of swinging arm are in a plane. The scanning tracks cross each other as both probes scan the mirror edge to edge. Since the surface heights should ideally be the same at these scanning crossings, this crossings height information can be used to calibrate the rotary table errors. But the crossings height information contains the swing arm air bearing errors and measurement errors of probes. The errors seriously affect the correction accuracy of rotary table errors. The swing arm air bearing errors and measurement errors of probes are randomly distributed, we use least square method to remove these errors. In this paper, we present the geometry of the dual probe swing arm profilometer system, and the profiling pattern made by both probes. We analyze the influence the probe separation has on the measurement results. The algorithm for stitching together the scans into a surface is also presented. The difference of the surface heights at the crossings of the adjacent scans is used to find a transformation that describes the rotary table errors and then to correct for the errors. To prove the error separation method based on a dual probe can successfully calibrate the rotary table errors, we establish SAP error model and simulate the effect of the error separation method based on a dual probe on calibrating the rotary table errors. © 2013 SPIE.
英文摘要: In this paper, we present an error separation method based on dual probes for the swing arm profilometer to calibrate the rotary table errors. Two probes and the rotation axis of swinging arm are in a plane. The scanning tracks cross each other as both probes scan the mirror edge to edge. Since the surface heights should ideally be the same at these scanning crossings, this crossings height information can be used to calibrate the rotary table errors. But the crossings height information contains the swing arm air bearing errors and measurement errors of probes. The errors seriously affect the correction accuracy of rotary table errors. The swing arm air bearing errors and measurement errors of probes are randomly distributed, we use least square method to remove these errors. In this paper, we present the geometry of the dual probe swing arm profilometer system, and the profiling pattern made by both probes. We analyze the influence the probe separation has on the measurement results. The algorithm for stitching together the scans into a surface is also presented. The difference of the surface heights at the crossings of the adjacent scans is used to find a transformation that describes the rotary table errors and then to correct for the errors. To prove the error separation method based on a dual probe can successfully calibrate the rotary table errors, we establish SAP error model and simulate the effect of the error separation method based on a dual probe on calibrating the rotary table errors. © 2013 SPIE.
收录类别: Ei
语种: 英语
卷号: 8905
ISSN号: 0277786X
文章类型: 会议论文
页码: 89051S
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7919
Appears in Collections:质量处(质检中心)_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
2. University of Chinese, Academy of Sciences, Beijing 100039, China

Recommended Citation:
Wei, Zhong-Wei,Jing, Hong-Wei,Kuang, Long,et al. Error separation technique for measuring aspheric surface based on dual probes[C]. 见:Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications. 2013.
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