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Sub-aperture Stitching with Scanning Pentaprism Testing Optical Wave-front
Wang Lihua; Yang Wei; Li Lei; Wu Shibin; Lin Zhaohen
Volume7654
Pages76540Y (5 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractThis paper describes a pentaprism scanning combined with sub-aperture stitching interference method to test large aperture optical system wave-front. This method uses pentaprism scanning and interferometer testing sub-aperture optical system wave-front, after testing all the sub-aperture wave-front and then using average error stitching algorithm to reconstruction full-aperture optical system wave-front. It makes use of the pentaprism easily to adjust and interferometer's high-precision characteristic. Analyzed the mechanical precision of turntable and electric guide, when the turntable sway angle is less than 8', location accuracy is less than 1.194' and the electric guide linearity is less than 8' location accuracy is less than 83.3 mu m, can meet the testing requirements. We used 40mm sub-aperture testing 312mm full aperture wave-front PV is 0.2197 lambda and RMS is 0.0536 lambda . Compared the stitching results with Zygo interferometer directly full aperture testing verified the accuracy of the method and provides a new idea for testing a large aperture optical wave-front.; This paper describes a pentaprism scanning combined with sub-aperture stitching interference method to test large aperture optical system wave-front. This method uses pentaprism scanning and interferometer testing sub-aperture optical system wave-front, after testing all the sub-aperture wave-front and then using average error stitching algorithm to reconstruction full-aperture optical system wave-front. It makes use of the pentaprism easily to adjust and interferometer's high-precision characteristic. Analyzed the mechanical precision of turntable and electric guide, when the turntable sway angle is less than 8', location accuracy is less than 1.194' and the electric guide linearity is less than 8' location accuracy is less than 83.3 mu m, can meet the testing requirements. We used 40mm sub-aperture testing 312mm full aperture wave-front PV is 0.2197 lambda and RMS is 0.0536 lambda . Compared the stitching results with Zygo interferometer directly full aperture testing verified the accuracy of the method and provides a new idea for testing a large aperture optical wave-front.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7912
Collection质量处(质检中心)
Corresponding AuthorWang Lihua
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Wang Lihua,Yang Wei,Li Lei,et al. Sub-aperture Stitching with Scanning Pentaprism Testing Optical Wave-front[C],2010:76540Y (5 pp.).
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