| 题名: | Sub-aperture Stitching with Scanning Pentaprism Testing Optical Wave-front |
| 作者: | Wang Lihua; Yang Wei; Li Lei; Wu Shibin; Lin Zhaohen
|
| 出版日期: | 2010
|
| 会议名称: | Proceedings of the SPIE - The International Society for Optical Engineering
|
| 会议日期: | 2010
|
| 通讯作者: | Wang Lihua
|
| 中文摘要: | This paper describes a pentaprism scanning combined with sub-aperture stitching interference method to test large aperture optical system wave-front. This method uses pentaprism scanning and interferometer testing sub-aperture optical system wave-front, after testing all the sub-aperture wave-front and then using average error stitching algorithm to reconstruction full-aperture optical system wave-front. It makes use of the pentaprism easily to adjust and interferometer's high-precision characteristic. Analyzed the mechanical precision of turntable and electric guide, when the turntable sway angle is less than 8', location accuracy is less than 1.194' and the electric guide linearity is less than 8' location accuracy is less than 83.3 mu m, can meet the testing requirements. We used 40mm sub-aperture testing 312mm full aperture wave-front PV is 0.2197 lambda and RMS is 0.0536 lambda . Compared the stitching results with Zygo interferometer directly full aperture testing verified the accuracy of the method and provides a new idea for testing a large aperture optical wave-front. |
| 英文摘要: | This paper describes a pentaprism scanning combined with sub-aperture stitching interference method to test large aperture optical system wave-front. This method uses pentaprism scanning and interferometer testing sub-aperture optical system wave-front, after testing all the sub-aperture wave-front and then using average error stitching algorithm to reconstruction full-aperture optical system wave-front. It makes use of the pentaprism easily to adjust and interferometer's high-precision characteristic. Analyzed the mechanical precision of turntable and electric guide, when the turntable sway angle is less than 8', location accuracy is less than 1.194' and the electric guide linearity is less than 8' location accuracy is less than 83.3 mu m, can meet the testing requirements. We used 40mm sub-aperture testing 312mm full aperture wave-front PV is 0.2197 lambda and RMS is 0.0536 lambda . Compared the stitching results with Zygo interferometer directly full aperture testing verified the accuracy of the method and provides a new idea for testing a large aperture optical wave-front. |
| 收录类别: | Ei
; ISTP
|
| 语种: | 英语
|
| 卷号: | 7654
|
| 文章类型: | 会议论文
|
| 页码: | 76540Y (5 pp.)
|
| 内容类型: | 会议论文
|
| URI标识: | http://ir.ioe.ac.cn/handle/181551/7912
|
| Appears in Collections: | 质量处（质检中心）_会议论文
|
|
There are no files associated with this item.
|
| Recommended Citation: | |
Wang Lihua,Yang Wei,Li Lei,et al. Sub-aperture Stitching with Scanning Pentaprism Testing Optical Wave-front[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
|
|
|
