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Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope
Gao, Mingxing1,2; Jing, Hongwei1; Cao, Xuedong1; Chen, Lin1,2; Yang, Jie1
Volume9623
Pages96229N
2015
Language英语
ISSN0277-786X
DOI10.1117/12.2186280
Indexed BySCI ; Ei
Subtype会议论文
AbstractWhen using the swing arm profilometer (SAP) to measure the aspheric mirror and the off-axis aspheric mirror, the error of the effective arm length of the SAP has an obvious influence on the measurement result. In order to reduce the influence of the effective arm length and increase the measurement accuracy of the SAP, the laser tracker is adopted to measure the effective arm length. Because the space position relationship of the probe system for the SAP is needed to measured before using the laser tracker, the point source microscope (PSM) is used to measure the space positional relationship. The measurement principle of the PSM and other applications are introduced; the accuracy and repeatability of this technology are analysed; the advantages and disadvantages of this technology are summarized. © 2015 SPIE.; When using the swing arm profilometer (SAP) to measure the aspheric mirror and the off-axis aspheric mirror, the error of the effective arm length of the SAP has an obvious influence on the measurement result. In order to reduce the influence of the effective arm length and increase the measurement accuracy of the SAP, the laser tracker is adopted to measure the effective arm length. Because the space position relationship of the probe system for the SAP is needed to measured before using the laser tracker, the point source microscope (PSM) is used to measure the space positional relationship. The measurement principle of the PSM and other applications are introduced; the accuracy and repeatability of this technology are analysed; the advantages and disadvantages of this technology are summarized. © 2015 SPIE.
Conference NameProceedings of SPIE - The International Society for Optical Engineering
Conference Date2015
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7908
Collection质量处(质检中心)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O .Box 350, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Gao, Mingxing,Jing, Hongwei,Cao, Xuedong,et al. Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope[C],2015:96229N.
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