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题名:
Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope
作者: Gao, Mingxing1,2; Jing, Hongwei1; Cao, Xuedong1; Chen, Lin1,2; Yang, Jie1
出版日期: 2015
会议名称: Proceedings of SPIE - The International Society for Optical Engineering
会议日期: 2015
学科分类: Microscopes - Mirrors - Optical instruments - Probes
DOI: 10.1117/12.2186280
中文摘要: When using the swing arm profilometer (SAP) to measure the aspheric mirror and the off-axis aspheric mirror, the error of the effective arm length of the SAP has an obvious influence on the measurement result. In order to reduce the influence of the effective arm length and increase the measurement accuracy of the SAP, the laser tracker is adopted to measure the effective arm length. Because the space position relationship of the probe system for the SAP is needed to measured before using the laser tracker, the point source microscope (PSM) is used to measure the space positional relationship. The measurement principle of the PSM and other applications are introduced; the accuracy and repeatability of this technology are analysed; the advantages and disadvantages of this technology are summarized. © 2015 SPIE.
英文摘要: When using the swing arm profilometer (SAP) to measure the aspheric mirror and the off-axis aspheric mirror, the error of the effective arm length of the SAP has an obvious influence on the measurement result. In order to reduce the influence of the effective arm length and increase the measurement accuracy of the SAP, the laser tracker is adopted to measure the effective arm length. Because the space position relationship of the probe system for the SAP is needed to measured before using the laser tracker, the point source microscope (PSM) is used to measure the space positional relationship. The measurement principle of the PSM and other applications are introduced; the accuracy and repeatability of this technology are analysed; the advantages and disadvantages of this technology are summarized. © 2015 SPIE.
收录类别: SCI ; Ei
语种: 英语
卷号: 9623
ISSN号: 0277-786X
文章类型: 会议论文
页码: 96229N
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7908
Appears in Collections:质量处(质检中心)_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O .Box 350, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China

Recommended Citation:
Gao, Mingxing,Jing, Hongwei,Cao, Xuedong,et al. Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope[C]. 见:Proceedings of SPIE - The International Society for Optical Engineering. 2015.
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