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题名:
Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity
作者: Shi, Zhendong1,2; Fang, Liang3; Zhou, Chongxi3
出版日期: 2015
会议名称: International Journal of Nanotechnology
会议日期: 2015
学科分类: Diffraction gratings - Electromechanical filters - Fabry-Perot interferometers - Filters (for fluids) - Machine design - Mechanics - Silicon wafers
DOI: 10.1504/IJNT.2015.071794
通讯作者: Zhou, Chongxi
中文摘要: This paper presents basic designs and operation concepts of a novel micro-electro-mechanical-systems (MEMS) filter integrating a tunable Fabry-Perot (FP) cavity and a grating. It is based on the filtering effect of the tunable FP cavity and the spatial separation function of the grating for the different wavelengths. The combination of two devices could widen the spectral range of the traditional FP filter without affecting its spectral linewidth. A MEMS filter configuration based on the silicon-glass bonded structure has been designed. The FP cavity length depends on the thickness of the silicon wafer itself to realise the long cavity length. The T-S cantilevers could decrease the micromirror deformation, and reduce the driving voltage appropriately. Calculational results indicate that narrow linewidth and wide spectral range could be obtained simultaneously at the long cavity length. Copyright © 2015 Inderscience Enterprises Ltd.
英文摘要: This paper presents basic designs and operation concepts of a novel micro-electro-mechanical-systems (MEMS) filter integrating a tunable Fabry-Perot (FP) cavity and a grating. It is based on the filtering effect of the tunable FP cavity and the spatial separation function of the grating for the different wavelengths. The combination of two devices could widen the spectral range of the traditional FP filter without affecting its spectral linewidth. A MEMS filter configuration based on the silicon-glass bonded structure has been designed. The FP cavity length depends on the thickness of the silicon wafer itself to realise the long cavity length. The T-S cantilevers could decrease the micromirror deformation, and reduce the driving voltage appropriately. Calculational results indicate that narrow linewidth and wide spectral range could be obtained simultaneously at the long cavity length. Copyright © 2015 Inderscience Enterprises Ltd.
收录类别: SCI ; Ei
语种: 英语
卷号: 12
ISSN号: 1475-7435
文章类型: 会议论文
页码: 829-837
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7902
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

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作者单位: 1. State Key Laboratory of Optical Technologies for Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of the Chinese, Academy of Sciences, Beijing, China
3. State Key Laboratory of Optical Technologies for Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, Chengdu, China

Recommended Citation:
Shi, Zhendong,Fang, Liang,Zhou, Chongxi. Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity[C]. 见:International Journal of Nanotechnology. 2015.
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