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Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity
Shi, Zhendong1,2; Fang, Liang3; Zhou, Chongxi3
Volume12
Pages829-837
2015
Language英语
ISSN1475-7435
DOI10.1504/IJNT.2015.071794
Indexed BySCI ; Ei
Subtype会议论文
AbstractThis paper presents basic designs and operation concepts of a novel micro-electro-mechanical-systems (MEMS) filter integrating a tunable Fabry-Perot (FP) cavity and a grating. It is based on the filtering effect of the tunable FP cavity and the spatial separation function of the grating for the different wavelengths. The combination of two devices could widen the spectral range of the traditional FP filter without affecting its spectral linewidth. A MEMS filter configuration based on the silicon-glass bonded structure has been designed. The FP cavity length depends on the thickness of the silicon wafer itself to realise the long cavity length. The T-S cantilevers could decrease the micromirror deformation, and reduce the driving voltage appropriately. Calculational results indicate that narrow linewidth and wide spectral range could be obtained simultaneously at the long cavity length. Copyright © 2015 Inderscience Enterprises Ltd.; This paper presents basic designs and operation concepts of a novel micro-electro-mechanical-systems (MEMS) filter integrating a tunable Fabry-Perot (FP) cavity and a grating. It is based on the filtering effect of the tunable FP cavity and the spatial separation function of the grating for the different wavelengths. The combination of two devices could widen the spectral range of the traditional FP filter without affecting its spectral linewidth. A MEMS filter configuration based on the silicon-glass bonded structure has been designed. The FP cavity length depends on the thickness of the silicon wafer itself to realise the long cavity length. The T-S cantilevers could decrease the micromirror deformation, and reduce the driving voltage appropriately. Calculational results indicate that narrow linewidth and wide spectral range could be obtained simultaneously at the long cavity length. Copyright © 2015 Inderscience Enterprises Ltd.
Conference NameInternational Journal of Nanotechnology
Conference Date2015
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Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7902
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorZhou, Chongxi
Affiliation1. State Key Laboratory of Optical Technologies for Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of the Chinese, Academy of Sciences, Beijing, China
3. State Key Laboratory of Optical Technologies for Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, Chengdu, China
Recommended Citation
GB/T 7714
Shi, Zhendong,Fang, Liang,Zhou, Chongxi. Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity[C],2015:829-837.
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