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题名:
A 19 element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator
作者: Wang, Weimin1,2,3; Tao, Fenggang1; Wang, Qiang1; Qiu, Chuankai1; Chen, Zexiang2; Yao, Jun1
出版日期: 2013
会议名称: Proceedings of SPIE: MEMS Adaptive Optics VII
会议日期: 2013
学科分类: Actuators - Electrostatics - Fabrication - Natural frequencies
DOI: 10.1117/12.2003017
中文摘要: A 19 element segmented MEMS deformable mirror(DM) based on electrostatic repulsive-force actuator is proposed and fabricated using a commercial surface micromachining process PolyMUMPs. Impacts of different sizes of actuator on DM's characterizations such as stroke, work bandwidth, driving voltage and fill factor are analyzed and optimized. An analytical analysis combined numerical simulation has been performed on the deformation of repulsive flexural beam actuator regarding actuator size and boundary condition. These analytic insights could provide guidelines for future MEMS DMs optimum design. A maximum stroke of the fabricated DM is 2.6μm, is larger than 2μm for the sacrificial layer thickness of PolyMUMPs. The preliminary aberration correction of the whole DM array is also analyzed. Compared to conventional MEMS DMs, this design demonstrates the advantage of large stroke over a standard surface micromachining fabrication process with a thin deposited layer, and it would expand the application of MEMS DMs in adaptive optics. © 2013 Copyright SPIE.
英文摘要: A 19 element segmented MEMS deformable mirror(DM) based on electrostatic repulsive-force actuator is proposed and fabricated using a commercial surface micromachining process PolyMUMPs. Impacts of different sizes of actuator on DM's characterizations such as stroke, work bandwidth, driving voltage and fill factor are analyzed and optimized. An analytical analysis combined numerical simulation has been performed on the deformation of repulsive flexural beam actuator regarding actuator size and boundary condition. These analytic insights could provide guidelines for future MEMS DMs optimum design. A maximum stroke of the fabricated DM is 2.6μm, is larger than 2μm for the sacrificial layer thickness of PolyMUMPs. The preliminary aberration correction of the whole DM array is also analyzed. Compared to conventional MEMS DMs, this design demonstrates the advantage of large stroke over a standard surface micromachining fabrication process with a thin deposited layer, and it would expand the application of MEMS DMs in adaptive optics. © 2013 Copyright SPIE.
收录类别: Ei
语种: 英语
卷号: 8617
ISSN号: 0277786X
文章类型: 会议论文
页码: 861702
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7894
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

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作者单位: 1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
3. University of Chinese Academy of Sciences, Beijing 100049, China

Recommended Citation:
Wang, Weimin,Tao, Fenggang,Wang, Qiang,et al. A 19 element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator[C]. 见:Proceedings of SPIE: MEMS Adaptive Optics VII. 2013.
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