IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)
A 19 element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator
Wang, Weimin1,2,3; Tao, Fenggang1; Wang, Qiang1; Qiu, Chuankai1; Chen, Zexiang2; Yao, Jun1
Volume8617
Pages861702
2013
Language英语
ISSN0277786X
DOI10.1117/12.2003017
Indexed ByEi
Subtype会议论文
AbstractA 19 element segmented MEMS deformable mirror(DM) based on electrostatic repulsive-force actuator is proposed and fabricated using a commercial surface micromachining process PolyMUMPs. Impacts of different sizes of actuator on DM's characterizations such as stroke, work bandwidth, driving voltage and fill factor are analyzed and optimized. An analytical analysis combined numerical simulation has been performed on the deformation of repulsive flexural beam actuator regarding actuator size and boundary condition. These analytic insights could provide guidelines for future MEMS DMs optimum design. A maximum stroke of the fabricated DM is 2.6μm, is larger than 2μm for the sacrificial layer thickness of PolyMUMPs. The preliminary aberration correction of the whole DM array is also analyzed. Compared to conventional MEMS DMs, this design demonstrates the advantage of large stroke over a standard surface micromachining fabrication process with a thin deposited layer, and it would expand the application of MEMS DMs in adaptive optics. © 2013 Copyright SPIE.; A 19 element segmented MEMS deformable mirror(DM) based on electrostatic repulsive-force actuator is proposed and fabricated using a commercial surface micromachining process PolyMUMPs. Impacts of different sizes of actuator on DM's characterizations such as stroke, work bandwidth, driving voltage and fill factor are analyzed and optimized. An analytical analysis combined numerical simulation has been performed on the deformation of repulsive flexural beam actuator regarding actuator size and boundary condition. These analytic insights could provide guidelines for future MEMS DMs optimum design. A maximum stroke of the fabricated DM is 2.6μm, is larger than 2μm for the sacrificial layer thickness of PolyMUMPs. The preliminary aberration correction of the whole DM array is also analyzed. Compared to conventional MEMS DMs, this design demonstrates the advantage of large stroke over a standard surface micromachining fabrication process with a thin deposited layer, and it would expand the application of MEMS DMs in adaptive optics. © 2013 Copyright SPIE.
Conference NameProceedings of SPIE: MEMS Adaptive Optics VII
Conference Date2013
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7894
Collection微细加工光学技术国家重点实验室(开放室)
Affiliation1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
3. University of Chinese Academy of Sciences, Beijing 100049, China
Recommended Citation
GB/T 7714
Wang, Weimin,Tao, Fenggang,Wang, Qiang,et al. A 19 element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator[C],2013:861702.
Files in This Item:
File Name/Size DocType Version Access License
2013-2088.pdf(1122KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Wang, Weimin]'s Articles
[Tao, Fenggang]'s Articles
[Wang, Qiang]'s Articles
Baidu academic
Similar articles in Baidu academic
[Wang, Weimin]'s Articles
[Tao, Fenggang]'s Articles
[Wang, Qiang]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Wang, Weimin]'s Articles
[Tao, Fenggang]'s Articles
[Wang, Qiang]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.