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题名:
MEMS grating with interdigitated-comb structure
作者: Zhang, Heng1,2; Yao, Jun1; Tao, Fenggang1,2; Zhuang, Xuye1
出版日期: 2012
会议名称: Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011
会议日期: 2012
DOI: 10.4028/www.scientific.net/KEM.503.49
通讯作者: Zhang, H. (zhukl@foxmail.com)
中文摘要: Grating as an important spectral component can be applied to spectral analysis, filtering, dispersion compensation, sensing and so on. Their advantages are compactness, potentially high actuation speed and the ability to deflect light at large angles. In this paper, a MEMS interdigitated-comb grating actuated by a comb-drive actuator is presented. An experiment is performed to demonstrate how the proposed grating works with an applied voltage. At 85V, the displacement of comb-drive actuator can achieve 2.1μm; accordingly the gap between the interdigitated-comb gratings varies by 2.1μm. The mechanical and the optical sensing properties of the MEMS grating are both analyzed in this paper. This grating can be widely used in optical sensor and to detect the micro-displacement. © (2012) Trans Tech Publications, Switzerland.
英文摘要: Grating as an important spectral component can be applied to spectral analysis, filtering, dispersion compensation, sensing and so on. Their advantages are compactness, potentially high actuation speed and the ability to deflect light at large angles. In this paper, a MEMS interdigitated-comb grating actuated by a comb-drive actuator is presented. An experiment is performed to demonstrate how the proposed grating works with an applied voltage. At 85V, the displacement of comb-drive actuator can achieve 2.1μm; accordingly the gap between the interdigitated-comb gratings varies by 2.1μm. The mechanical and the optical sensing properties of the MEMS grating are both analyzed in this paper. This grating can be widely used in optical sensor and to detect the micro-displacement. © (2012) Trans Tech Publications, Switzerland.
收录类别: Ei
语种: 英语
卷号: 503
ISSN号: 10139826
文章类型: 会议论文
页码: 49-54
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7891
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

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作者单位: 1. State Key of Optic Technologies for Micro Fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Zhang, Heng,Yao, Jun,Tao, Fenggang,et al. MEMS grating with interdigitated-comb structure[C]. 见:Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011. 2012.
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