IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)
MEMS grating with interdigitated-comb structure
Zhang, Heng1,2; Yao, Jun1; Tao, Fenggang1,2; Zhuang, Xuye1; Zhang, H. (zhukl@foxmail.com)
Volume503
Pages49-54
2012
Language英语
ISSN10139826
DOI10.4028/www.scientific.net/KEM.503.49
Indexed ByEi
Subtype会议论文
AbstractGrating as an important spectral component can be applied to spectral analysis, filtering, dispersion compensation, sensing and so on. Their advantages are compactness, potentially high actuation speed and the ability to deflect light at large angles. In this paper, a MEMS interdigitated-comb grating actuated by a comb-drive actuator is presented. An experiment is performed to demonstrate how the proposed grating works with an applied voltage. At 85V, the displacement of comb-drive actuator can achieve 2.1μm; accordingly the gap between the interdigitated-comb gratings varies by 2.1μm. The mechanical and the optical sensing properties of the MEMS grating are both analyzed in this paper. This grating can be widely used in optical sensor and to detect the micro-displacement. © (2012) Trans Tech Publications, Switzerland.; Grating as an important spectral component can be applied to spectral analysis, filtering, dispersion compensation, sensing and so on. Their advantages are compactness, potentially high actuation speed and the ability to deflect light at large angles. In this paper, a MEMS interdigitated-comb grating actuated by a comb-drive actuator is presented. An experiment is performed to demonstrate how the proposed grating works with an applied voltage. At 85V, the displacement of comb-drive actuator can achieve 2.1μm; accordingly the gap between the interdigitated-comb gratings varies by 2.1μm. The mechanical and the optical sensing properties of the MEMS grating are both analyzed in this paper. This grating can be widely used in optical sensor and to detect the micro-displacement. © (2012) Trans Tech Publications, Switzerland.
Conference NameKey Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7891
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorZhang, H. (zhukl@foxmail.com)
Affiliation1. State Key of Optic Technologies for Micro Fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Zhang, Heng,Yao, Jun,Tao, Fenggang,et al. MEMS grating with interdigitated-comb structure[C],2012:49-54.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zhang, Heng]'s Articles
[Yao, Jun]'s Articles
[Tao, Fenggang]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zhang, Heng]'s Articles
[Yao, Jun]'s Articles
[Tao, Fenggang]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zhang, Heng]'s Articles
[Yao, Jun]'s Articles
[Tao, Fenggang]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.