IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)
A 19 element hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror
Wang, Weimin1,2,3; Tao, Fenggang1,3; Zhang, Jianfei1,3; Yao, Jun1; Wang, W. (weiminwang@qq.com)
Volume503
Pages169-173
2012
Language英语
ISSN10139826
DOI10.4028/www.scientific.net/KEM.503.169
Indexed ByEi
Subtype会议论文
AbstractA new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control. © (2012) Trans Tech Publications, Switzerland.; A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control. © (2012) Trans Tech Publications, Switzerland.
Conference NameKey Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011
Conference Date2012
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7890
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorWang, W. (weiminwang@qq.com)
Affiliation1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054, China
3. Graduate University of Chinese Academy of Sciences, Beijing 100049, China
Recommended Citation
GB/T 7714
Wang, Weimin,Tao, Fenggang,Zhang, Jianfei,et al. A 19 element hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror[C],2012:169-173.
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