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题名:
A 19 element hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror
作者: Wang, Weimin1,2,3; Tao, Fenggang1,3; Zhang, Jianfei1,3; Yao, Jun1
出版日期: 2012
会议名称: Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011
会议日期: 2012
DOI: 10.4028/www.scientific.net/KEM.503.169
通讯作者: Wang, W. (weiminwang@qq.com)
中文摘要: A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control. © (2012) Trans Tech Publications, Switzerland.
英文摘要: A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control. © (2012) Trans Tech Publications, Switzerland.
收录类别: Ei
语种: 英语
卷号: 503
ISSN号: 10139826
文章类型: 会议论文
页码: 169-173
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7890
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

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作者单位: 1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054, China
3. Graduate University of Chinese Academy of Sciences, Beijing 100049, China

Recommended Citation:
Wang, Weimin,Tao, Fenggang,Zhang, Jianfei,et al. A 19 element hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror[C]. 见:Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011. 2012.
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