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Micromachined Spatial Light Modulator (μSLM) Based on Leverage Amplification
Hao Ren; Zugao Ni; Jianming Chen; Ailing Gong; Jun Yao
2010
Language英语
Subtype会议论文
AbstractThis paper presents a novel out-of-plane μSLM based on leverage amplification. Design principles and analytical models are both developed, verified by Finite-Element-Analysis (FEA). The μSLM consists of four individual actuators, each actuated by electrostatic attractive force to produce a downward displacement, which will be magnified at the other end through the lever. Compared with conventional electrostatic μSLMs, the stroke of proposed design can be remarkably increased. Then the optimization of the design is also given to produce largest out-of-plane stroke. The mirror is 500μm by 500μm by 1.5μm and the lever is 200μm by 30μm by 2μm. As large as a 4.5μm stroke is obtained by simulation and the resonant frequent is about 4.8 KHz.; This paper presents a novel out-of-plane μSLM based on leverage amplification. Design principles and analytical models are both developed, verified by Finite-Element-Analysis (FEA). The μSLM consists of four individual actuators, each actuated by electrostatic attractive force to produce a downward displacement, which will be magnified at the other end through the lever. Compared with conventional electrostatic μSLMs, the stroke of proposed design can be remarkably increased. Then the optimization of the design is also given to produce largest out-of-plane stroke. The mirror is 500μm by 500μm by 1.5μm and the lever is 200μm by 30μm by 2μm. As large as a 4.5μm stroke is obtained by simulation and the resonant frequent is about 4.8 KHz.
Conference Name2nd Internaional Conference of CSMNT
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7880
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorHao Ren
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Hao Ren,Zugao Ni,Jianming Chen,et al. Micromachined Spatial Light Modulator (μSLM) Based on Leverage Amplification[C],2010.
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2010-088.pdf(222KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
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