| Characteristics of sensors based on MEMS grating with interdigitated comb structures | |
| Naike Wei; Weimin Wang; Jun Yao; Kefan Chen; Jianhua Zhu; Fuhua Gao | |
| Volume | 7657 |
| Pages | 76571O (6 pp.) |
| 2010 | |
| Language | 英语 |
| Indexed By | Ei ; ISTP |
| Subtype | 会议论文 |
| Abstract | Gratings as important spectral components have been employed in various optics applications, such as spectral analysis, filtering, dispersion compensation, sensing and so on. However, the physical structure of gratings produced by conventional technologies can not be alterable, this limits their applications under some specific requirements. Fortunately, MEMS technology breaks through that restriction, an interdigitated comb structure has been demonstrated in this paper. The comb structure has two sets of comb gratings; one is stationary and the other is movable in the horizontal plane. By driving the movable comb gratings, the intensity of diffraction will be adjustable. Under the condition of Fraunhofer approximation, the broadening extent of zero-order diffraction is monotonically increasing with the longitudinal displacement, and the relation between the intensity of first-order diffraction and the lateral displacement is a cosine squared function. A displacement sensor based on movable comb structures is presented and detailed analysis on sensitivity factors is given.; Gratings as important spectral components have been employed in various optics applications, such as spectral analysis, filtering, dispersion compensation, sensing and so on. However, the physical structure of gratings produced by conventional technologies can not be alterable, this limits their applications under some specific requirements. Fortunately, MEMS technology breaks through that restriction, an interdigitated comb structure has been demonstrated in this paper. The comb structure has two sets of comb gratings; one is stationary and the other is movable in the horizontal plane. By driving the movable comb gratings, the intensity of diffraction will be adjustable. Under the condition of Fraunhofer approximation, the broadening extent of zero-order diffraction is monotonically increasing with the longitudinal displacement, and the relation between the intensity of first-order diffraction and the lateral displacement is a cosine squared function. A displacement sensor based on movable comb structures is presented and detailed analysis on sensitivity factors is given. |
| Conference Name | Proceedings of the SPIE - The International Society for Optical Engineering |
| Conference Date | 2010 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7878 |
| Collection | 微细加工光学技术国家重点实验室（开放室） |
| Corresponding Author | Naike Wei |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Naike Wei,Weimin Wang,Jun Yao,et al. Characteristics of sensors based on MEMS grating with interdigitated comb structures[C],2010:76571O (6 pp.). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2010-102.pdf（258KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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