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Characteristics of sensors based on MEMS grating with interdigitated comb structures
Naike Wei; Weimin Wang; Jun Yao; Kefan Chen; Jianhua Zhu; Fuhua Gao
Volume7657
Pages76571O (6 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractGratings as important spectral components have been employed in various optics applications, such as spectral analysis, filtering, dispersion compensation, sensing and so on. However, the physical structure of gratings produced by conventional technologies can not be alterable, this limits their applications under some specific requirements. Fortunately, MEMS technology breaks through that restriction, an interdigitated comb structure has been demonstrated in this paper. The comb structure has two sets of comb gratings; one is stationary and the other is movable in the horizontal plane. By driving the movable comb gratings, the intensity of diffraction will be adjustable. Under the condition of Fraunhofer approximation, the broadening extent of zero-order diffraction is monotonically increasing with the longitudinal displacement, and the relation between the intensity of first-order diffraction and the lateral displacement is a cosine squared function. A displacement sensor based on movable comb structures is presented and detailed analysis on sensitivity factors is given.; Gratings as important spectral components have been employed in various optics applications, such as spectral analysis, filtering, dispersion compensation, sensing and so on. However, the physical structure of gratings produced by conventional technologies can not be alterable, this limits their applications under some specific requirements. Fortunately, MEMS technology breaks through that restriction, an interdigitated comb structure has been demonstrated in this paper. The comb structure has two sets of comb gratings; one is stationary and the other is movable in the horizontal plane. By driving the movable comb gratings, the intensity of diffraction will be adjustable. Under the condition of Fraunhofer approximation, the broadening extent of zero-order diffraction is monotonically increasing with the longitudinal displacement, and the relation between the intensity of first-order diffraction and the lateral displacement is a cosine squared function. A displacement sensor based on movable comb structures is presented and detailed analysis on sensitivity factors is given.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7878
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorNaike Wei
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Naike Wei,Weimin Wang,Jun Yao,et al. Characteristics of sensors based on MEMS grating with interdigitated comb structures[C],2010:76571O (6 pp.).
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