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Design and analysis of repulsive electrostatic driven MEMS actuators
Yao Jun; Hu Fangrong; Cai DongmEi; Jiang Wenhan
Volume7209
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractFor many astronomical systems, Adaptive Optics (AO) plays an important role. Here, we report some preliminary studies on MEMS (Micro-Electro-Mechanical-System) Project for micro actuators in AO applications at the Institute of Optics and Electronics, Chinese Academy of Science. This paper presents a few MEMS actuators based on repulsive electrostatic driven mechanism, which can achieve large out-of-plane strokes through eliminating the electrostatic pull-in effect. Design principles, including the layout and the physical dimension of electrodes, and FEA models are illustrated; it provides helpful guidance for designing electrostatic repulsive actuators for bEing implemented in Deformable Mirrors (DMs). Some repulsive electrostatic driven micro actuators are given, the analysis focus on the displacement versus applied voltage and resonant frequency. Repulsive electrostatic driven actuators can achieve large strokes and high resonant frequencies, they meet the important requirements for DMs.; For many astronomical systems, Adaptive Optics (AO) plays an important role. Here, we report some preliminary studies on MEMS (Micro-Electro-Mechanical-System) Project for micro actuators in AO applications at the Institute of Optics and Electronics, Chinese Academy of Science. This paper presents a few MEMS actuators based on repulsive electrostatic driven mechanism, which can achieve large out-of-plane strokes through eliminating the electrostatic pull-in effect. Design principles, including the layout and the physical dimension of electrodes, and FEA models are illustrated; it provides helpful guidance for designing electrostatic repulsive actuators for bEing implemented in Deformable Mirrors (DMs). Some repulsive electrostatic driven micro actuators are given, the analysis focus on the displacement versus applied voltage and resonant frequency. Repulsive electrostatic driven actuators can achieve large strokes and high resonant frequencies, they meet the important requirements for DMs.
Conference NameProceedings of SPIE
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7871
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorYao Jun
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Yao Jun,Hu Fangrong,Cai DongmEi,et al. Design and analysis of repulsive electrostatic driven MEMS actuators[C],2009.
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