中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)  > 会议论文
题名:
Design and analysis of repulsive electrostatic driven MEMS actuators
作者: Yao Jun; Hu Fangrong; Cai DongmEi; Jiang Wenhan
出版日期: 2009
会议名称: Proceedings of SPIE
会议日期: 2009
通讯作者: Yao Jun
中文摘要: For many astronomical systems, Adaptive Optics (AO) plays an important role. Here, we report some preliminary studies on MEMS (Micro-Electro-Mechanical-System) Project for micro actuators in AO applications at the Institute of Optics and Electronics, Chinese Academy of Science. This paper presents a few MEMS actuators based on repulsive electrostatic driven mechanism, which can achieve large out-of-plane strokes through eliminating the electrostatic pull-in effect. Design principles, including the layout and the physical dimension of electrodes, and FEA models are illustrated; it provides helpful guidance for designing electrostatic repulsive actuators for bEing implemented in Deformable Mirrors (DMs). Some repulsive electrostatic driven micro actuators are given, the analysis focus on the displacement versus applied voltage and resonant frequency. Repulsive electrostatic driven actuators can achieve large strokes and high resonant frequencies, they meet the important requirements for DMs.
英文摘要: For many astronomical systems, Adaptive Optics (AO) plays an important role. Here, we report some preliminary studies on MEMS (Micro-Electro-Mechanical-System) Project for micro actuators in AO applications at the Institute of Optics and Electronics, Chinese Academy of Science. This paper presents a few MEMS actuators based on repulsive electrostatic driven mechanism, which can achieve large out-of-plane strokes through eliminating the electrostatic pull-in effect. Design principles, including the layout and the physical dimension of electrodes, and FEA models are illustrated; it provides helpful guidance for designing electrostatic repulsive actuators for bEing implemented in Deformable Mirrors (DMs). Some repulsive electrostatic driven micro actuators are given, the analysis focus on the displacement versus applied voltage and resonant frequency. Repulsive electrostatic driven actuators can achieve large strokes and high resonant frequencies, they meet the important requirements for DMs.
收录类别: Ei
语种: 英语
卷号: 7209
文章类型: 会议论文
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7871
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

Files in This Item:
File Name/ File Size Content Type Version Access License
2009-121.pdf(631KB)会议论文--限制开放View 联系获取全文

作者单位: 中国科学院光电技术研究所

Recommended Citation:
Yao Jun,Hu Fangrong,Cai DongmEi,et al. Design and analysis of repulsive electrostatic driven MEMS actuators[C]. 见:Proceedings of SPIE. 2009.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Yao Jun]'s Articles
[Hu Fangrong]'s Articles
[Cai DongmEi]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Yao Jun]‘s Articles
[Hu Fangrong]‘s Articles
[Cai DongmEi]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: 2009-121.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace