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Design of optical coherence tomography probe using a 2-axis MEMS scanning mirror
Wang Dajia; Shi Guohua; Li Zhang; Cai DongmEi; Yao Jun; Fan Tianquan
Volume7284
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractWe design a dual axis rotary mirror based on microelectromechanical system technology used for the endoscopic optical coherence tomography (OCT) application. With the inherent advantages of the micromachined device such as small size, low consumption and high reliability, it allows the miniaturization of conventional bulky OCT probe. The dimension of the micro-mirror is 140um×270um. Through use of finite element method, the simulation results show that the scanning mirror is capable of high frequency out-of-plane rotation in two mutually independent axes. The natural frequencies of the first two modes, corresponding to tip and tilt modes, are 65.74 KHz and 65.75 KHz respectively. The MEMS scanning mirror is electrostatically actuated with the supply voltage ranging from 30v to 40v. Via 2-axis scanning, a three-dimensional image of biological tissue can be acquired when the MEMS mirror is integrated with the OCT probe system. The entire MEMS scanner can be fabricated using the proposed surface-micromachining process, capable of mass production.; We design a dual axis rotary mirror based on microelectromechanical system technology used for the endoscopic optical coherence tomography (OCT) application. With the inherent advantages of the micromachined device such as small size, low consumption and high reliability, it allows the miniaturization of conventional bulky OCT probe. The dimension of the micro-mirror is 140um×270um. Through use of finite element method, the simulation results show that the scanning mirror is capable of high frequency out-of-plane rotation in two mutually independent axes. The natural frequencies of the first two modes, corresponding to tip and tilt modes, are 65.74 KHz and 65.75 KHz respectively. The MEMS scanning mirror is electrostatically actuated with the supply voltage ranging from 30v to 40v. Via 2-axis scanning, a three-dimensional image of biological tissue can be acquired when the MEMS mirror is integrated with the OCT probe system. The entire MEMS scanner can be fabricated using the proposed surface-micromachining process, capable of mass production.
Conference NameProceedings of SPIE
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7870
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorWang Dajia
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Wang Dajia,Shi Guohua,Li Zhang,et al. Design of optical coherence tomography probe using a 2-axis MEMS scanning mirror[C],2009.
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