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题名:
Design of optical coherence tomography probe using a 2-axis MEMS scanning mirror
作者: Wang Dajia; Shi Guohua; Li Zhang; Cai DongmEi; Yao Jun; Fan Tianquan
出版日期: 2009
会议名称: Proceedings of SPIE
会议日期: 2009
通讯作者: Wang Dajia
中文摘要: We design a dual axis rotary mirror based on microelectromechanical system technology used for the endoscopic optical coherence tomography (OCT) application. With the inherent advantages of the micromachined device such as small size, low consumption and high reliability, it allows the miniaturization of conventional bulky OCT probe. The dimension of the micro-mirror is 140um×270um. Through use of finite element method, the simulation results show that the scanning mirror is capable of high frequency out-of-plane rotation in two mutually independent axes. The natural frequencies of the first two modes, corresponding to tip and tilt modes, are 65.74 KHz and 65.75 KHz respectively. The MEMS scanning mirror is electrostatically actuated with the supply voltage ranging from 30v to 40v. Via 2-axis scanning, a three-dimensional image of biological tissue can be acquired when the MEMS mirror is integrated with the OCT probe system. The entire MEMS scanner can be fabricated using the proposed surface-micromachining process, capable of mass production.
英文摘要: We design a dual axis rotary mirror based on microelectromechanical system technology used for the endoscopic optical coherence tomography (OCT) application. With the inherent advantages of the micromachined device such as small size, low consumption and high reliability, it allows the miniaturization of conventional bulky OCT probe. The dimension of the micro-mirror is 140um×270um. Through use of finite element method, the simulation results show that the scanning mirror is capable of high frequency out-of-plane rotation in two mutually independent axes. The natural frequencies of the first two modes, corresponding to tip and tilt modes, are 65.74 KHz and 65.75 KHz respectively. The MEMS scanning mirror is electrostatically actuated with the supply voltage ranging from 30v to 40v. Via 2-axis scanning, a three-dimensional image of biological tissue can be acquired when the MEMS mirror is integrated with the OCT probe system. The entire MEMS scanner can be fabricated using the proposed surface-micromachining process, capable of mass production.
收录类别: Ei
语种: 英语
卷号: 7284
文章类型: 会议论文
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7870
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Wang Dajia,Shi Guohua,Li Zhang,et al. Design of optical coherence tomography probe using a 2-axis MEMS scanning mirror[C]. 见:Proceedings of SPIE. 2009.
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文件名: 2009-120.pdf
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