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题名:
Design and optimization of 2D electrostatic micro scanning mirrors
作者: Ma Wenying; Hu Fangrong; Cai DongmEi; Wang Dajia; Yao Jun; Qiu Chuankai
出版日期: 2009
会议名称: Proceedings of SPIE
会议日期: 2009
通讯作者: Ma Wenying
中文摘要: This paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance.
英文摘要: This paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance.
收录类别: Ei
语种: 英语
卷号: 7284
文章类型: 会议论文
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7869
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Ma Wenying,Hu Fangrong,Cai DongmEi,et al. Design and optimization of 2D electrostatic micro scanning mirrors[C]. 见:Proceedings of SPIE. 2009.
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文件名: 2009-119.pdf
格式: Adobe PDF
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