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Design and optimization of 2D electrostatic micro scanning mirrors
Ma Wenying; Hu Fangrong; Cai DongmEi; Wang Dajia; Yao Jun; Qiu Chuankai
Volume7284
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractThis paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance.; This paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance.
Conference NameProceedings of SPIE
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7869
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorMa Wenying
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Ma Wenying,Hu Fangrong,Cai DongmEi,et al. Design and optimization of 2D electrostatic micro scanning mirrors[C],2009.
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2009-119.pdf(318KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
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