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题名:
Optical efficiency of MEMS deformable mirror for adaptive optics
作者: Cai DongmEi; Yao Jun; Jiang Wenhan
出版日期: 2009
会议名称: Proceedings of SPIE
会议日期: 2009
通讯作者: Cai DongmEi
中文摘要: MEMS deformable mirror (DM) has yet to be incorporated into a facility AO instrument especially for atmospheric compensation. Apart from these drawbacks such as limited stroke, reliability, its optical efficiency should also be concerted. The wavefront corrector in AO system should existing high optical efficiency especially atmospheric compensation under faint stars. However the MEMS DM fabricated by surface process must have etch holes in the surface of mirror. The diffraction results from etch holes decrease its optical efficiency. An MEMS deformable mirror is fabricated by commercial PolyMUMPs. There is array of etch holes to ensure that the sacrifice layer is released fully. The far field intensity distribution was simulated. The result has been analyzed and used to constructed a simple modal of the studied MEMS DM.
英文摘要: MEMS deformable mirror (DM) has yet to be incorporated into a facility AO instrument especially for atmospheric compensation. Apart from these drawbacks such as limited stroke, reliability, its optical efficiency should also be concerted. The wavefront corrector in AO system should existing high optical efficiency especially atmospheric compensation under faint stars. However the MEMS DM fabricated by surface process must have etch holes in the surface of mirror. The diffraction results from etch holes decrease its optical efficiency. An MEMS deformable mirror is fabricated by commercial PolyMUMPs. There is array of etch holes to ensure that the sacrifice layer is released fully. The far field intensity distribution was simulated. The result has been analyzed and used to constructed a simple modal of the studied MEMS DM.
收录类别: Ei
语种: 英语
卷号: 7210
文章类型: 会议论文
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7865
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Cai DongmEi,Yao Jun,Jiang Wenhan. Optical efficiency of MEMS deformable mirror for adaptive optics[C]. 见:Proceedings of SPIE. 2009.
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