| Optical efficiency of MEMS deformable mirror for adaptive optics | |
| Cai DongmEi; Yao Jun; Jiang Wenhan | |
| Volume | 7210 |
| 2009 | |
| Language | 英语 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | MEMS deformable mirror (DM) has yet to be incorporated into a facility AO instrument especially for atmospheric compensation. Apart from these drawbacks such as limited stroke, reliability, its optical efficiency should also be concerted. The wavefront corrector in AO system should existing high optical efficiency especially atmospheric compensation under faint stars. However the MEMS DM fabricated by surface process must have etch holes in the surface of mirror. The diffraction results from etch holes decrease its optical efficiency. An MEMS deformable mirror is fabricated by commercial PolyMUMPs. There is array of etch holes to ensure that the sacrifice layer is released fully. The far field intensity distribution was simulated. The result has been analyzed and used to constructed a simple modal of the studied MEMS DM.; MEMS deformable mirror (DM) has yet to be incorporated into a facility AO instrument especially for atmospheric compensation. Apart from these drawbacks such as limited stroke, reliability, its optical efficiency should also be concerted. The wavefront corrector in AO system should existing high optical efficiency especially atmospheric compensation under faint stars. However the MEMS DM fabricated by surface process must have etch holes in the surface of mirror. The diffraction results from etch holes decrease its optical efficiency. An MEMS deformable mirror is fabricated by commercial PolyMUMPs. There is array of etch holes to ensure that the sacrifice layer is released fully. The far field intensity distribution was simulated. The result has been analyzed and used to constructed a simple modal of the studied MEMS DM. |
| Conference Name | Proceedings of SPIE |
| Conference Date | 2009 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7865 |
| Collection | 微细加工光学技术国家重点实验室（开放室） |
| Corresponding Author | Cai DongmEi |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Cai DongmEi,Yao Jun,Jiang Wenhan. Optical efficiency of MEMS deformable mirror for adaptive optics[C],2009. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2009-113.pdf（252KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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