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题名:
Study of inverted thermal evaporation for large mirror
作者: Pei, Wenjun; Liu, Hongxiang
出版日期: 2014
会议名称: Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
会议日期: 2014
学科分类: Aluminum - Coatings - Evaporation - Manufacture - Mirrors - Optical testing - Reflection - Telescopes - Thermal evaporation
DOI: 10.1117/12.2068419
中文摘要: From October 2010 to December 2012, the systematic study of the protected aluminum coating which is thermally evaporated downwards for large primary mirror had been developed. By adjusting the structure, it makes the physical nonuniformity of the bare aluminum films in the diameter of 1.8m drop to 4.18%, and the average reflectivity meets 95.09% in the band 400nm-2500nm. The optimized parameters suggest that the SiOx (1xNy protective film which is formed with 25sccm nitrogen flow not only has the environmental adaptability as the SiOx film but also resists to the salt spray corrosion. But the average reflectivity of the SiOxNy protected aluminum coating decreases about 2%, reach 88.6%, in the band 400nm-2500nm. © 2014 SPIE.
英文摘要: From October 2010 to December 2012, the systematic study of the protected aluminum coating which is thermally evaporated downwards for large primary mirror had been developed. By adjusting the structure, it makes the physical nonuniformity of the bare aluminum films in the diameter of 1.8m drop to 4.18%, and the average reflectivity meets 95.09% in the band 400nm-2500nm. The optimized parameters suggest that the SiOx (1xNy protective film which is formed with 25sccm nitrogen flow not only has the environmental adaptability as the SiOx film but also resists to the salt spray corrosion. But the average reflectivity of the SiOxNy protected aluminum coating decreases about 2%, reach 88.6%, in the band 400nm-2500nm. © 2014 SPIE.
收录类别: Ei
语种: 英语
卷号: 9280
ISSN号: 0277786X
文章类型: 会议论文
页码: 92800H
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7862
Appears in Collections:薄膜光学技术研究室(十一室)_会议论文

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作者单位: Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China

Recommended Citation:
Pei, Wenjun,Liu, Hongxiang. Study of inverted thermal evaporation for large mirror[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes. 2014.
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