IOE OpenIR  > 薄膜光学技术研究室(十一室)
Study of inverted thermal evaporation for large mirror
Pei, Wenjun; Liu, Hongxiang
Volume9280
Pages92800H
2014
Language英语
ISSN0277786X
DOI10.1117/12.2068419
Indexed ByEi
Subtype会议论文
AbstractFrom October 2010 to December 2012, the systematic study of the protected aluminum coating which is thermally evaporated downwards for large primary mirror had been developed. By adjusting the structure, it makes the physical nonuniformity of the bare aluminum films in the diameter of 1.8m drop to 4.18%, and the average reflectivity meets 95.09% in the band 400nm-2500nm. The optimized parameters suggest that the SiOx (1xNy protective film which is formed with 25sccm nitrogen flow not only has the environmental adaptability as the SiOx film but also resists to the salt spray corrosion. But the average reflectivity of the SiOxNy protected aluminum coating decreases about 2%, reach 88.6%, in the band 400nm-2500nm. © 2014 SPIE.; From October 2010 to December 2012, the systematic study of the protected aluminum coating which is thermally evaporated downwards for large primary mirror had been developed. By adjusting the structure, it makes the physical nonuniformity of the bare aluminum films in the diameter of 1.8m drop to 4.18%, and the average reflectivity meets 95.09% in the band 400nm-2500nm. The optimized parameters suggest that the SiOx (1xNy protective film which is formed with 25sccm nitrogen flow not only has the environmental adaptability as the SiOx film but also resists to the salt spray corrosion. But the average reflectivity of the SiOxNy protected aluminum coating decreases about 2%, reach 88.6%, in the band 400nm-2500nm. © 2014 SPIE.
Conference NameProceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
Conference Date2014
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Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7862
Collection薄膜光学技术研究室(十一室)
Affiliation Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation
GB/T 7714
Pei, Wenjun,Liu, Hongxiang. Study of inverted thermal evaporation for large mirror[C],2014:92800H.
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