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Accuracy improvement of multi-parameter estimation in combined photocarrier radiometry and free carrier absorption for characterization of silicon wafers
Huang, Qiuping1,2; Li, Bincheng1; Ren, Shengdong1,2; Li, B. (bcli@ioe.ac.cn)
Volume33
Pages2076-2081
2012
Language英语
ISSN0195928X
DOI10.1007/s10765-012-1267-0
Indexed BySCI ; Ei
Subtype会议论文
AbstractNumerical simulations are performed to investigate the effect of experimental parameters on the simultaneous determination of the electronic transport properties (namely, the carrier lifetime, the carrier diffusion coefficient, and the surface recombination velocities) of semiconductor wafers in the combined photocarrier radiometry (PCR) and free carrier absorption (FCA) technique via a multi-parameter estimation procedure. The uncertainties of the fitted parameter values are analyzed by investigating the dependence of a mean square variance including both amplitude and phase errors on the corresponding transport parameters. Simulation results show that the optimal experimental conditions with a combination of an appropriate pump-probe-beam separation and a small (comparable to or slightly larger than the pump beam radius) detection radius in FCA, as well as a large (1 mm) detection radius in PCR, can noticeably reduce the uncertainties of the simultaneously fitted transport properties of wafers. © 2012 Springer Science+Business Media, LLC.; Numerical simulations are performed to investigate the effect of experimental parameters on the simultaneous determination of the electronic transport properties (namely, the carrier lifetime, the carrier diffusion coefficient, and the surface recombination velocities) of semiconductor wafers in the combined photocarrier radiometry (PCR) and free carrier absorption (FCA) technique via a multi-parameter estimation procedure. The uncertainties of the fitted parameter values are analyzed by investigating the dependence of a mean square variance including both amplitude and phase errors on the corresponding transport parameters. Simulation results show that the optimal experimental conditions with a combination of an appropriate pump-probe-beam separation and a small (comparable to or slightly larger than the pump beam radius) detection radius in FCA, as well as a large (1 mm) detection radius in PCR, can noticeably reduce the uncertainties of the simultaneously fitted transport properties of wafers. © 2012 Springer Science+Business Media, LLC.
Conference NameInternational Journal of Thermophysics
Conference Date2012
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Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7854
Collection薄膜光学技术研究室(十一室)
Corresponding AuthorLi, B. (bcli@ioe.ac.cn)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Shuangliu, Chengdu Sichuan 610209, China
2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Huang, Qiuping,Li, Bincheng,Ren, Shengdong,et al. Accuracy improvement of multi-parameter estimation in combined photocarrier radiometry and free carrier absorption for characterization of silicon wafers[C],2012:2076-2081.
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