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题名:
Accuracy improvement of multi-parameter estimation in combined photocarrier radiometry and free carrier absorption for characterization of silicon wafers
作者: Huang, Qiuping1,2; Li, Bincheng1; Ren, Shengdong1,2
出版日期: 2012
会议名称: International Journal of Thermophysics
会议日期: 2012
DOI: 10.1007/s10765-012-1267-0
通讯作者: Li, B. (bcli@ioe.ac.cn)
中文摘要: Numerical simulations are performed to investigate the effect of experimental parameters on the simultaneous determination of the electronic transport properties (namely, the carrier lifetime, the carrier diffusion coefficient, and the surface recombination velocities) of semiconductor wafers in the combined photocarrier radiometry (PCR) and free carrier absorption (FCA) technique via a multi-parameter estimation procedure. The uncertainties of the fitted parameter values are analyzed by investigating the dependence of a mean square variance including both amplitude and phase errors on the corresponding transport parameters. Simulation results show that the optimal experimental conditions with a combination of an appropriate pump-probe-beam separation and a small (comparable to or slightly larger than the pump beam radius) detection radius in FCA, as well as a large (1 mm) detection radius in PCR, can noticeably reduce the uncertainties of the simultaneously fitted transport properties of wafers. © 2012 Springer Science+Business Media, LLC.
英文摘要: Numerical simulations are performed to investigate the effect of experimental parameters on the simultaneous determination of the electronic transport properties (namely, the carrier lifetime, the carrier diffusion coefficient, and the surface recombination velocities) of semiconductor wafers in the combined photocarrier radiometry (PCR) and free carrier absorption (FCA) technique via a multi-parameter estimation procedure. The uncertainties of the fitted parameter values are analyzed by investigating the dependence of a mean square variance including both amplitude and phase errors on the corresponding transport parameters. Simulation results show that the optimal experimental conditions with a combination of an appropriate pump-probe-beam separation and a small (comparable to or slightly larger than the pump beam radius) detection radius in FCA, as well as a large (1 mm) detection radius in PCR, can noticeably reduce the uncertainties of the simultaneously fitted transport properties of wafers. © 2012 Springer Science+Business Media, LLC.
收录类别: SCI ; Ei
语种: 英语
卷号: 33
ISSN号: 0195928X
文章类型: 会议论文
页码: 2076-2081
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7854
Appears in Collections:薄膜光学技术研究室(十一室)_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Shuangliu, Chengdu Sichuan 610209, China
2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Huang, Qiuping,Li, Bincheng,Ren, Shengdong. Accuracy improvement of multi-parameter estimation in combined photocarrier radiometry and free carrier absorption for characterization of silicon wafers[C]. 见:International Journal of Thermophysics. 2012.
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