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题名:
Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models
作者: Weidong Gao; Yinhua Zhang; Hongxiang Liu
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Weidong Gao
中文摘要: Optical constants of vacuum-deposited hafnium oxide film (HfO/sub 2/) from infrared to ultraviolet spectral region (215nm-1700nm) have been determined by variable angle Spectroscopic ellipsometry with Cauchy dispersion model, Sellmeier dispersion model, Cauchy-Urbach dispersion model and Tauc-Lorentz dispersion model, respectively. The optical constants of the HfO/sub 2/ film which were extracted with the four dispersion models have been compared. The surface roughness layer between HfO/sub 2/ film and air and the interface layer between the film and the substrate have also been modeled with Bruggeman effective medium approximation (BEMA).
英文摘要: Optical constants of vacuum-deposited hafnium oxide film (HfO/sub 2/) from infrared to ultraviolet spectral region (215nm-1700nm) have been determined by variable angle Spectroscopic ellipsometry with Cauchy dispersion model, Sellmeier dispersion model, Cauchy-Urbach dispersion model and Tauc-Lorentz dispersion model, respectively. The optical constants of the HfO/sub 2/ film which were extracted with the four dispersion models have been compared. The surface roughness layer between HfO/sub 2/ film and air and the interface layer between the film and the substrate have also been modeled with Bruggeman effective medium approximation (BEMA).
收录类别: Ei ; ISTP
语种: 英语
卷号: 7656
文章类型: 会议论文
页码: 76566T (8 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7845
Appears in Collections:薄膜光学技术研究室(十一室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Weidong Gao,Yinhua Zhang,Hongxiang Liu. Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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