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Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models
Weidong Gao; Yinhua Zhang; Hongxiang Liu
Volume7656
Pages76566T (8 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractOptical constants of vacuum-deposited hafnium oxide film (HfO/sub 2/) from infrared to ultraviolet spectral region (215nm-1700nm) have been determined by variable angle Spectroscopic ellipsometry with Cauchy dispersion model, Sellmeier dispersion model, Cauchy-Urbach dispersion model and Tauc-Lorentz dispersion model, respectively. The optical constants of the HfO/sub 2/ film which were extracted with the four dispersion models have been compared. The surface roughness layer between HfO/sub 2/ film and air and the interface layer between the film and the substrate have also been modeled with Bruggeman effective medium approximation (BEMA).; Optical constants of vacuum-deposited hafnium oxide film (HfO/sub 2/) from infrared to ultraviolet spectral region (215nm-1700nm) have been determined by variable angle Spectroscopic ellipsometry with Cauchy dispersion model, Sellmeier dispersion model, Cauchy-Urbach dispersion model and Tauc-Lorentz dispersion model, respectively. The optical constants of the HfO/sub 2/ film which were extracted with the four dispersion models have been compared. The surface roughness layer between HfO/sub 2/ film and air and the interface layer between the film and the substrate have also been modeled with Bruggeman effective medium approximation (BEMA).
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7845
Collection薄膜光学技术研究室(十一室)
Corresponding AuthorWeidong Gao
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Weidong Gao,Yinhua Zhang,Hongxiang Liu. Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models[C],2010:76566T (8 pp.).
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