| 题名: | Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film |
| 作者: | WEidong Gao
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| 出版日期: | 2009
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| 会议名称: | Proceedings of SPIE
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| 会议日期: | 2009
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| 通讯作者: | WEidong Gao
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| 中文摘要: | Optical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μmu; m) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed. |
| 英文摘要: | Optical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μmu; m) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed. |
| 收录类别: | Ei
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| 语种: | 英语
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| 卷号: | 7283
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| 文章类型: | 会议论文
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| 页码: | 72832L
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7844
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| Appears in Collections: | 薄膜光学技术研究室（十一室）_会议论文
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| 2009-210.pdf（327KB） | 会议论文 | -- | 限制开放 | | View
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| Recommended Citation: | |
WEidong Gao. Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film[C]. 见:Proceedings of SPIE. 2009.
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