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Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film
WEidong Gao
Volume7283
Pages72832L
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractOptical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μmu; m) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed.; Optical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μmu; m) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed.
Conference NameProceedings of SPIE
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7844
Collection薄膜光学技术研究室(十一室)
Corresponding AuthorWEidong Gao
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
WEidong Gao. Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film[C],2009:72832L.
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