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题名:
Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film
作者: WEidong Gao
出版日期: 2009
会议名称: Proceedings of SPIE
会议日期: 2009
通讯作者: WEidong Gao
中文摘要: Optical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μmu; m) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed.
英文摘要: Optical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μmu; m) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed.
收录类别: Ei
语种: 英语
卷号: 7283
文章类型: 会议论文
页码: 72832L
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7844
Appears in Collections:薄膜光学技术研究室(十一室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
WEidong Gao. Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film[C]. 见:Proceedings of SPIE. 2009.
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文件名: 2009-210.pdf
格式: Adobe PDF
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