| Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film | |
| WEidong Gao | |
| Volume | 7283 |
| Pages | 72832L |
| 2009 | |
| Language | 英语 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | Optical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μmu; m) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed.; Optical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μmu; m) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed. |
| Conference Name | Proceedings of SPIE |
| Conference Date | 2009 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7844 |
| Collection | 薄膜光学技术研究室（十一室） |
| Corresponding Author | WEidong Gao |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | WEidong Gao. Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film[C],2009:72832L. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2009-210.pdf（327KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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