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A fast high voltage driver for the piezoelectric fast steering mirror
Fan, Muwen1,2,3; Huang, Linhai1,2; Li, Mei1,2; Rao, Changhui1,2; Luo, Xi1,2
Volume9255
Pages925539
2015
Language英语
ISSN0277-786X
DOI10.1117/12.2065380
Indexed BySCI ; Ei
Subtype会议论文
AbstractThis paper describes High Voltage Driver (HVD) development for Piezoelectric Fast Steering Mirror (PFSM). Piezoelectric actuator's highly capacitive nature and its influence on high voltage driver are discussed. Since the PFSM tends toward higher speed and larger angle, a multi-paralleling power booster output stage linear high voltage amplifier is described that can output significantly higher current than single output stage linear power amplifier. Test results are presented for a fast high voltage driver that can drive a 300mm diameter PFSM (2.5μF piezoelectric actuator) at 100Hz 1000Vpp, also at 5000Hz 20Vpp. © 2015 SPIE.; This paper describes High Voltage Driver (HVD) development for Piezoelectric Fast Steering Mirror (PFSM). Piezoelectric actuator's highly capacitive nature and its influence on high voltage driver are discussed. Since the PFSM tends toward higher speed and larger angle, a multi-paralleling power booster output stage linear high voltage amplifier is described that can output significantly higher current than single output stage linear power amplifier. Test results are presented for a fast high voltage driver that can drive a 300mm diameter PFSM (2.5μF piezoelectric actuator) at 100Hz 1000Vpp, also at 5000Hz 20Vpp. © 2015 SPIE.
Conference NameProceedings of SPIE: 20th International Symposium on High Power Systems and Applications 2014, HPLS and A 2014
Conference Date2015
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7838
Collection自适应光学技术研究室(八室)
Corresponding AuthorFan, Muwen
Affiliation1. Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu, China
2. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
3. University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Fan, Muwen,Huang, Linhai,Li, Mei,et al. A fast high voltage driver for the piezoelectric fast steering mirror[C],2015:925539.
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