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Analysis of pinhole vector diffraction in visible-light
Wang, Li1,2,3; Rao, Changhui1,2; Rao, Xuejun1,2; Yang, Jinsheng1,2; Wang, L. (wangli9613@126.com)
Volume8418
Pages84181C
2012
Language英语
ISSN0277786X
DOI10.1117/12.974352
Indexed ByEi
Subtype会议论文
AbstractUsing Hartmann-Shack (H-S) wave-front sensor to test lenses with high numerical aperture, the reference spherical wave-front from pinhole is used to calibrate the Hartmann sensor to improve the precision of calibration, but intensity uniformity of the reference spherical wave-front affects the precision of Hartmann sensor's calibration. Based on the vector diffraction theory, intensity uniformity is calculated with finite-difference time-domain method in case of a converging Gaussian incident visible light on pinhole. In order to proof the correctness of the intensity model of pinhole vector diffraction, experimentation of intensity is performed in visible-light. When the pinhole is the material aluminum with thickness 200nm and pinhole diameter 500nm, the absolute error of intensity uniformity is about 2.57% and 2.31% within 0.75 NA and 0.5 NA of diffracted wave-front by comparing experiment result with simulation result, so the intensity model is accurate. © 2012 SPIE.; Using Hartmann-Shack (H-S) wave-front sensor to test lenses with high numerical aperture, the reference spherical wave-front from pinhole is used to calibrate the Hartmann sensor to improve the precision of calibration, but intensity uniformity of the reference spherical wave-front affects the precision of Hartmann sensor's calibration. Based on the vector diffraction theory, intensity uniformity is calculated with finite-difference time-domain method in case of a converging Gaussian incident visible light on pinhole. In order to proof the correctness of the intensity model of pinhole vector diffraction, experimentation of intensity is performed in visible-light. When the pinhole is the material aluminum with thickness 200nm and pinhole diameter 500nm, the absolute error of intensity uniformity is about 2.57% and 2.31% within 0.75 NA and 0.5 NA of diffracted wave-front by comparing experiment result with simulation result, so the intensity model is accurate. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7772
Collection自适应光学技术研究室(八室)
Corresponding AuthorWang, L. (wangli9613@126.com)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. Key Laboratory on Adaptive Optics of the Chinese Academy of Sciences, Chengdu, 610209, China
3. Graduate University of the Chinese Academy of Sciences, Beijing, 100049, China
Recommended Citation
GB/T 7714
Wang, Li,Rao, Changhui,Rao, Xuejun,et al. Analysis of pinhole vector diffraction in visible-light[C],2012:84181C.
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