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题名:
Inverse open loop control of a nano-positioner based on piezo-electric actuators
作者: Qiang, Shu1,2,3; Rao, Xuejun1,2; Shi, Ningping1,2
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
会议日期: 2012
DOI: 10.1117/12.970645
通讯作者: Qiang, S.
中文摘要: Piezo-electric actuators with advantage of fast responsiveness, large force output, low power consumption, negligible friction and no backlash are widely used in precision positioning, adaptive optics and vibration conduction. However its inherent hysteresis brings difficulty to high precision positioning. To describe the hysteresis, a mathematical model based on experimental data is used. And the inverse of the model is connected to the piezo-electric actuator as a controller to compensating the hysteresis. In this paper KP operator is used to model the hysteresis of piezo-electric actuators and a numerical algorithm is proposed to compute the inverse. Experiments data of major hysteresis loop and minor loop collected on a nano-positioning stage are used to identify the model Γ based on which the inverse model Γ-1is developed. Experiments show that given a voltage series the model Γ can give displacement prediction which has an error of 6% relative to experimental results and Γ-1 can give voltage prediction with the error of 5% relative to the experimental data. © 2012 SPIE.
英文摘要: Piezo-electric actuators with advantage of fast responsiveness, large force output, low power consumption, negligible friction and no backlash are widely used in precision positioning, adaptive optics and vibration conduction. However its inherent hysteresis brings difficulty to high precision positioning. To describe the hysteresis, a mathematical model based on experimental data is used. And the inverse of the model is connected to the piezo-electric actuator as a controller to compensating the hysteresis. In this paper KP operator is used to model the hysteresis of piezo-electric actuators and a numerical algorithm is proposed to compute the inverse. Experiments data of major hysteresis loop and minor loop collected on a nano-positioning stage are used to identify the model Γ based on which the inverse model Γ-1is developed. Experiments show that given a voltage series the model Γ can give displacement prediction which has an error of 6% relative to experimental results and Γ-1 can give voltage prediction with the error of 5% relative to the experimental data. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8418
ISSN号: 0277786X
文章类型: 会议论文
页码: 84181I
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7771
Appears in Collections:自适应光学技术研究室(八室)_会议论文

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作者单位: 1. Laboratory on Adaptive Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu 610209, China
3. Graduate School of Chinese Academy of Sciences, Beijing 100049, China

Recommended Citation:
Qiang, Shu,Rao, Xuejun,Shi, Ningping. Inverse open loop control of a nano-positioner based on piezo-electric actuators[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems. 2012.
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