题名:  Inverse open loop control of a nanopositioner based on piezoelectric actuators 
作者:  Qiang, Shu^{1,2,3}; Rao, Xuejun^{1,2}; Shi, Ningping^{1,2}

出版日期:  2012

会议名称:  Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro and NanoOptical Devices, and Systems

会议日期:  2012

DOI:  10.1117/12.970645

通讯作者:  Qiang, S.

中文摘要:  Piezoelectric actuators with advantage of fast responsiveness, large force output, low power consumption, negligible friction and no backlash are widely used in precision positioning, adaptive optics and vibration conduction. However its inherent hysteresis brings difficulty to high precision positioning. To describe the hysteresis, a mathematical model based on experimental data is used. And the inverse of the model is connected to the piezoelectric actuator as a controller to compensating the hysteresis. In this paper KP operator is used to model the hysteresis of piezoelectric actuators and a numerical algorithm is proposed to compute the inverse. Experiments data of major hysteresis loop and minor loop collected on a nanopositioning stage are used to identify the model Γ based on which the inverse model Γ1is developed. Experiments show that given a voltage series the model Γ can give displacement prediction which has an error of 6% relative to experimental results and Γ1 can give voltage prediction with the error of 5% relative to the experimental data. © 2012 SPIE. 
英文摘要:  Piezoelectric actuators with advantage of fast responsiveness, large force output, low power consumption, negligible friction and no backlash are widely used in precision positioning, adaptive optics and vibration conduction. However its inherent hysteresis brings difficulty to high precision positioning. To describe the hysteresis, a mathematical model based on experimental data is used. And the inverse of the model is connected to the piezoelectric actuator as a controller to compensating the hysteresis. In this paper KP operator is used to model the hysteresis of piezoelectric actuators and a numerical algorithm is proposed to compute the inverse. Experiments data of major hysteresis loop and minor loop collected on a nanopositioning stage are used to identify the model Γ based on which the inverse model Γ1is developed. Experiments show that given a voltage series the model Γ can give displacement prediction which has an error of 6% relative to experimental results and Γ1 can give voltage prediction with the error of 5% relative to the experimental data. © 2012 SPIE. 
收录类别:  Ei

语种:  英语

卷号:  8418

ISSN号:  0277786X

文章类型:  会议论文

页码:  84181I

Citation statistics: 

内容类型:  会议论文

URI标识:  http://ir.ioe.ac.cn/handle/181551/7771

Appears in Collections:  自适应光学技术研究室（八室）_会议论文

File Name/ File Size 
Content Type 
Version 
Access 
License 

20122090.pdf（624KB）  会议论文    限制开放   View
联系获取全文 

作者单位:  1. Laboratory on Adaptive Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2. Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu 610209, China 3. Graduate School of Chinese Academy of Sciences, Beijing 100049, China

Recommended Citation: 
Qiang, Shu,Rao, Xuejun,Shi, Ningping. Inverse open loop control of a nanopositioner based on piezoelectric actuators[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro and NanoOptical Devices, and Systems. 2012.


