| 题名: | Anti-reflection coating on calcium fluoride substrate using ion-assisted deposition |
| 作者: | Zhang, Yao-Ping1,2; Fan, Jun-Qi1,2; Xu, Hong1,2
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| 出版日期: | 2012
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| 会议名称: | Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
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| 会议日期: | 2012
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| DOI: | 10.1117/12.976048
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| 通讯作者: | Zhang, Y.-P.
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| 中文摘要: | The IR AR coating is of great importance in contemporary optics industry, thus in this theme we investigate deposition processes of anti-reflection coatings on calcium fluoride substrate using ion-assisted deposition, including single layer of ZnSbF3 and a multilayer coating of AR. These thin films are produced by thermal evaporation using ion-assisted deposition, and with their optical characteristics measured and calculated, we analyzed the influence of ion source parameters on coatings such as anode voltage, anode current, argon flow, and so on. Based on research upon, we finally put forward the appropriate parameters to deposition antireflection coating on calcium fluoride substrate, in which the anode voltage and anode current play important roles in influencing the index of refraction and extinction coefficient of single layer of ZnS and YbF3 coatings in the infrared wavelength. Moreover, because of the ambient moisture, the anti-reflection coating deposition only work for ZnS and YbF3, but a Y2O3 layer can be added to protect the anti-reflection coating. In the end, we measured the coating with spectrometer and find out its average transmission reached 99.8%, which can satisfy the practical requirement. © 2012 SPIE. |
| 英文摘要: | The IR AR coating is of great importance in contemporary optics industry, thus in this theme we investigate deposition processes of anti-reflection coatings on calcium fluoride substrate using ion-assisted deposition, including single layer of ZnSbF3 and a multilayer coating of AR. These thin films are produced by thermal evaporation using ion-assisted deposition, and with their optical characteristics measured and calculated, we analyzed the influence of ion source parameters on coatings such as anode voltage, anode current, argon flow, and so on. Based on research upon, we finally put forward the appropriate parameters to deposition antireflection coating on calcium fluoride substrate, in which the anode voltage and anode current play important roles in influencing the index of refraction and extinction coefficient of single layer of ZnS and YbF3 coatings in the infrared wavelength. Moreover, because of the ambient moisture, the anti-reflection coating deposition only work for ZnS and YbF3, but a Y2O3 layer can be added to protect the anti-reflection coating. In the end, we measured the coating with spectrometer and find out its average transmission reached 99.8%, which can satisfy the practical requirement. © 2012 SPIE. |
| 收录类别: | Ei
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| 语种: | 英语
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| 卷号: | 8416
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| ISSN号: | 0277786X
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| 文章类型: | 会议论文
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| 页码: | 84161Q
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| Citation statistics: |
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7769
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| Appears in Collections: | 自适应光学技术研究室（八室）_会议论文
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| 2012-2082.pdf（177KB） | 会议论文 | -- | 限制开放 | | View
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作者单位: | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
2. Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
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| Recommended Citation: | |
Zhang, Yao-Ping,Fan, Jun-Qi,Xu, Hong. Anti-reflection coating on calcium fluoride substrate using ion-assisted deposition[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. 2012.
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