| Testing aspheric surface with annular subaperture stitching method based on Hartmann Shack sensor | |
| Hongyan Xu; Hao Xian; Yudong Zhang | |
| Volume | 7656 |
| Pages | 76564Y (8 pp.) |
| 2010 | |
| Language | 英语 |
| Indexed By | Ei ; ISTP |
| Subtype | 会议论文 |
| Abstract | Annular subaperture stitching method based on Hartmann Shack sensor for testing aspheric surface is developed in this paper. The basic principle of the method is described. The modal wavefront reconstruction algorithm with annular Zernike polynomials is established to get the subaperture wavefront. The stitching algorithm based on annular Zernike polynomials is employed to get the whole-aperture wavefront. An ellipsoidal surface tested by this method. The linked surface profile is coinciding with the whole-aperture surface profile directly tested by Zygo Interferometer, and the peakvalley value and root mean square value of the residual wavefront between the two above wavefronts are 0.096 waves and 0.019 waves.; Annular subaperture stitching method based on Hartmann Shack sensor for testing aspheric surface is developed in this paper. The basic principle of the method is described. The modal wavefront reconstruction algorithm with annular Zernike polynomials is established to get the subaperture wavefront. The stitching algorithm based on annular Zernike polynomials is employed to get the whole-aperture wavefront. An ellipsoidal surface tested by this method. The linked surface profile is coinciding with the whole-aperture surface profile directly tested by Zygo Interferometer, and the peakvalley value and root mean square value of the residual wavefront between the two above wavefronts are 0.096 waves and 0.019 waves. |
| Conference Name | Proceedings of the SPIE - The International Society for Optical Engineering |
| Conference Date | 2010 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7753 |
| Collection | 自适应光学技术研究室（八室） |
| Corresponding Author | Hongyan Xu |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Hongyan Xu,Hao Xian,Yudong Zhang. Testing aspheric surface with annular subaperture stitching method based on Hartmann Shack sensor[C],2010:76564Y (8 pp.). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2010-011.pdf（1180KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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