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Testing aspheric surface with annular subaperture stitching method based on Hartmann Shack sensor
Hongyan Xu; Hao Xian; Yudong Zhang
Volume7656
Pages76564Y (8 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractAnnular subaperture stitching method based on Hartmann Shack sensor for testing aspheric surface is developed in this paper. The basic principle of the method is described. The modal wavefront reconstruction algorithm with annular Zernike polynomials is established to get the subaperture wavefront. The stitching algorithm based on annular Zernike polynomials is employed to get the whole-aperture wavefront. An ellipsoidal surface tested by this method. The linked surface profile is coinciding with the whole-aperture surface profile directly tested by Zygo Interferometer, and the peakvalley value and root mean square value of the residual wavefront between the two above wavefronts are 0.096 waves and 0.019 waves.; Annular subaperture stitching method based on Hartmann Shack sensor for testing aspheric surface is developed in this paper. The basic principle of the method is described. The modal wavefront reconstruction algorithm with annular Zernike polynomials is established to get the subaperture wavefront. The stitching algorithm based on annular Zernike polynomials is employed to get the whole-aperture wavefront. An ellipsoidal surface tested by this method. The linked surface profile is coinciding with the whole-aperture surface profile directly tested by Zygo Interferometer, and the peakvalley value and root mean square value of the residual wavefront between the two above wavefronts are 0.096 waves and 0.019 waves.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7753
Collection自适应光学技术研究室(八室)
Corresponding AuthorHongyan Xu
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Hongyan Xu,Hao Xian,Yudong Zhang. Testing aspheric surface with annular subaperture stitching method based on Hartmann Shack sensor[C],2010:76564Y (8 pp.).
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