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题名:
Testing aspheric surface with annular subaperture stitching method based on Hartmann Shack sensor
作者: Hongyan Xu; Hao Xian; Yudong Zhang
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Hongyan Xu
中文摘要: Annular subaperture stitching method based on Hartmann Shack sensor for testing aspheric surface is developed in this paper. The basic principle of the method is described. The modal wavefront reconstruction algorithm with annular Zernike polynomials is established to get the subaperture wavefront. The stitching algorithm based on annular Zernike polynomials is employed to get the whole-aperture wavefront. An ellipsoidal surface tested by this method. The linked surface profile is coinciding with the whole-aperture surface profile directly tested by Zygo Interferometer, and the peakvalley value and root mean square value of the residual wavefront between the two above wavefronts are 0.096 waves and 0.019 waves.
英文摘要: Annular subaperture stitching method based on Hartmann Shack sensor for testing aspheric surface is developed in this paper. The basic principle of the method is described. The modal wavefront reconstruction algorithm with annular Zernike polynomials is established to get the subaperture wavefront. The stitching algorithm based on annular Zernike polynomials is employed to get the whole-aperture wavefront. An ellipsoidal surface tested by this method. The linked surface profile is coinciding with the whole-aperture surface profile directly tested by Zygo Interferometer, and the peakvalley value and root mean square value of the residual wavefront between the two above wavefronts are 0.096 waves and 0.019 waves.
收录类别: Ei ; ISTP
语种: 英语
卷号: 7656
文章类型: 会议论文
页码: 76564Y (8 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7753
Appears in Collections:自适应光学技术研究室(八室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Hongyan Xu,Hao Xian,Yudong Zhang. Testing aspheric surface with annular subaperture stitching method based on Hartmann Shack sensor[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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