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题名:
Study of PZT actuated deformable aspheric polishing lap
作者: Hu Ziqiang; Ling Ning; Pan Junhua; Jiang Wenhan
出版日期: 2009
会议名称: Proceedings of SPIE
会议日期: 2009
通讯作者: Hu Ziqiang
中文摘要: In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the surface of aspheric optical mirror. A novel method of designing deformable polishing lap is brought forward by using PZT actuator. It consists of an aluminum disk which can change surface profile continuously under the control of PZT actuators. When the deformable aspherical polishing lap moves on the surface of aspherical mirror, the needed deformation of each PZT actuator is calculated at any location. After each PZT actuator deforming, the surface profile of deformable aspherical polishing lap is changed to an off-axis surface of aspheric optical mirror at that location. In this paper, the rational of the PZT actuated deformable aspheric polishing lap is introduced,and the calculation method of deformation is explored also.By using finite element method, the deforming capability of the PZT actuated deformable aspheric polishing lap is simulated to reform a hyperboloid mirror with diameter 350mm,k=-1.112155,R=840.0 mm. Two type of PZT actuator arrangements are compared and analyzed. The results show that the PZT actuated deformable aspheric polishing lap can reshape to fit the surface of aspheric mirror and the RMS is less than 2um.
英文摘要: In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the surface of aspheric optical mirror. A novel method of designing deformable polishing lap is brought forward by using PZT actuator. It consists of an aluminum disk which can change surface profile continuously under the control of PZT actuators. When the deformable aspherical polishing lap moves on the surface of aspherical mirror, the needed deformation of each PZT actuator is calculated at any location. After each PZT actuator deforming, the surface profile of deformable aspherical polishing lap is changed to an off-axis surface of aspheric optical mirror at that location. In this paper, the rational of the PZT actuated deformable aspheric polishing lap is introduced,and the calculation method of deformation is explored also.By using finite element method, the deforming capability of the PZT actuated deformable aspheric polishing lap is simulated to reform a hyperboloid mirror with diameter 350mm,k=-1.112155,R=840.0 mm. Two type of PZT actuator arrangements are compared and analyzed. The results show that the PZT actuated deformable aspheric polishing lap can reshape to fit the surface of aspheric mirror and the RMS is less than 2um.
收录类别: Ei
语种: 英语
卷号: 7282
文章类型: 会议论文
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7720
Appears in Collections:自适应光学技术研究室(八室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Hu Ziqiang,Ling Ning,Pan Junhua,et al. Study of PZT actuated deformable aspheric polishing lap[C]. 见:Proceedings of SPIE. 2009.
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文件名: 2009-029.pdf
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