| The theoretical analysis of tri-beam SPPs interference through Ag film | |
| Fengze Jin; JinglEi Du; Yongkang Guo; Lifang Shi; ChunlEi Du | |
| Volume | 7284 |
| Pages | 1-5 |
| 2009 | |
| Language | 英语 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | Through combination of multi-beam coherent SPPs which are excited by p-polarized wide light which illuminates the interface between prism and metal with resonance angle for interference exposure with, and optimizes exposal parameter of interference lithography, we can obtain high differentiate and high contrast of periodicity nanometer structure by using SPPs of shortwave and near field with enhanced. In this paper,we set up interferential model of SPPs using equation groups of Maxwell below Kretschmann structure, and simulate SPPs interferns and receive nanometer lattice and discuss the influence of refractive index of prism and resist .The method is suitable for fabricating nanometer photonic crystal and deep sub-micrometer periodic patterns in large field size used in opto-eletronical components and it can effectively debase got-up cost.; Through combination of multi-beam coherent SPPs which are excited by p-polarized wide light which illuminates the interface between prism and metal with resonance angle for interference exposure with, and optimizes exposal parameter of interference lithography, we can obtain high differentiate and high contrast of periodicity nanometer structure by using SPPs of shortwave and near field with enhanced. In this paper,we set up interferential model of SPPs using equation groups of Maxwell below Kretschmann structure, and simulate SPPs interferns and receive nanometer lattice and discuss the influence of refractive index of prism and resist .The method is suitable for fabricating nanometer photonic crystal and deep sub-micrometer periodic patterns in large field size used in opto-eletronical components and it can effectively debase got-up cost. |
| Conference Name | Proceedings of SPIE |
| Conference Date | 2009 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7677 |
| Collection | 微电子装备总体研究室（四室微光学） |
| Corresponding Author | Fengze Jin |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Fengze Jin,JinglEi Du,Yongkang Guo,et al. The theoretical analysis of tri-beam SPPs interference through Ag film[C],2009:1-5. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2009-237.pdf（280KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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