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The theoretical analysis of tri-beam SPPs interference through Ag film
Fengze Jin; JinglEi Du; Yongkang Guo; Lifang Shi; ChunlEi Du
Volume7284
Pages1-5
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractThrough combination of multi-beam coherent SPPs which are excited by p-polarized wide light which illuminates the interface between prism and metal with resonance angle for interference exposure with, and optimizes exposal parameter of interference lithography, we can obtain high differentiate and high contrast of periodicity nanometer structure by using SPPs of shortwave and near field with enhanced. In this paper,we set up interferential model of SPPs using equation groups of Maxwell below Kretschmann structure, and simulate SPPs interferns and receive nanometer lattice and discuss the influence of refractive index of prism and resist .The method is suitable for fabricating nanometer photonic crystal and deep sub-micrometer periodic patterns in large field size used in opto-eletronical components and it can effectively debase got-up cost.; Through combination of multi-beam coherent SPPs which are excited by p-polarized wide light which illuminates the interface between prism and metal with resonance angle for interference exposure with, and optimizes exposal parameter of interference lithography, we can obtain high differentiate and high contrast of periodicity nanometer structure by using SPPs of shortwave and near field with enhanced. In this paper,we set up interferential model of SPPs using equation groups of Maxwell below Kretschmann structure, and simulate SPPs interferns and receive nanometer lattice and discuss the influence of refractive index of prism and resist .The method is suitable for fabricating nanometer photonic crystal and deep sub-micrometer periodic patterns in large field size used in opto-eletronical components and it can effectively debase got-up cost.
Conference NameProceedings of SPIE
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7677
Collection微电子装备总体研究室(四室微光学)
Corresponding AuthorFengze Jin
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Fengze Jin,JinglEi Du,Yongkang Guo,et al. The theoretical analysis of tri-beam SPPs interference through Ag film[C],2009:1-5.
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