| 题名: | The theoretical analysis of tri-beam SPPs interference through Ag film |
| 作者: | Fengze Jin; JinglEi Du; Yongkang Guo; Lifang Shi; ChunlEi Du
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| 出版日期: | 2009
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| 会议名称: | Proceedings of SPIE
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| 会议日期: | 2009
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| 通讯作者: | Fengze Jin
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| 中文摘要: | Through combination of multi-beam coherent SPPs which are excited by p-polarized wide light which illuminates the interface between prism and metal with resonance angle for interference exposure with, and optimizes exposal parameter of interference lithography, we can obtain high differentiate and high contrast of periodicity nanometer structure by using SPPs of shortwave and near field with enhanced. In this paper,we set up interferential model of SPPs using equation groups of Maxwell below Kretschmann structure, and simulate SPPs interferns and receive nanometer lattice and discuss the influence of refractive index of prism and resist .The method is suitable for fabricating nanometer photonic crystal and deep sub-micrometer periodic patterns in large field size used in opto-eletronical components and it can effectively debase got-up cost. |
| 英文摘要: | Through combination of multi-beam coherent SPPs which are excited by p-polarized wide light which illuminates the interface between prism and metal with resonance angle for interference exposure with, and optimizes exposal parameter of interference lithography, we can obtain high differentiate and high contrast of periodicity nanometer structure by using SPPs of shortwave and near field with enhanced. In this paper,we set up interferential model of SPPs using equation groups of Maxwell below Kretschmann structure, and simulate SPPs interferns and receive nanometer lattice and discuss the influence of refractive index of prism and resist .The method is suitable for fabricating nanometer photonic crystal and deep sub-micrometer periodic patterns in large field size used in opto-eletronical components and it can effectively debase got-up cost. |
| 收录类别: | Ei
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| 语种: | 英语
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| 卷号: | 7284
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| 文章类型: | 会议论文
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| 页码: | 1-5
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7677
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| Appears in Collections: | 微电子装备总体研究室（四室微光学） _会议论文
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| 2009-237.pdf（280KB） | 会议论文 | -- | 限制开放 | | View
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| Recommended Citation: | |
Fengze Jin,JinglEi Du,Yongkang Guo,et al. The theoretical analysis of tri-beam SPPs interference through Ag film[C]. 见:Proceedings of SPIE. 2009.
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