| 题名: | Fabrication of resonant subwavelength grating based on thiol-ene |
| 作者: | Zhang, Man; Deng, Qiling; Shi, Lifang; Li, Zhiwei; Pang, Hui; Zhang, Yukun; Yu, Jinqing; Hu, Song
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| 出版日期: | 2014
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| 会议名称: | Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems
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| 会议日期: | 2014
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| 学科分类: | Casting - Curing - Diffraction gratings - Fabrication - Manufacture - Molds - Nanostructures - Optical devices - Organic polymers - Silicones
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| DOI: | 10.1117/12.2068526
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| 通讯作者: | Deng, Qiling
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| 中文摘要: | This paper presents an approach used to fabricate resonant subwavelength grating based on thiol-ene material. First of all, polydimethylsiloxane soft imprint stamp with opposite structure of the subwavelength grating master mold is made by casting. Then, the desired subwavelength grating with UV-curable thiol-ene material grating structure is fabricated using the polydimethylsioxane soft stamp by UV-curable soft-lithography. Here, we fabricate a subwavelength grating with period of 300nm using the approach, which could reflect blue light with wavelength ranging from 448nm to 482nm at a specific angle and presents the excellent resonant characteristic. The experimental results are consistent with the simulation results, demonstrating that the approach proposed in this paper could effectively fabricate the thiol-ene material resonant subwavelength grating structure. The thiol-ene material is a new green UV-curable polymer material, including a number of advantages such as rapid UV-curing in the natural environment, low-cost, high resolution, and regulative performance characteristic. The fabrication technique in this paper is simple, low-cost, and easy to high throughput, which has broad application prospects in the preparation of micro and nano structures. © 2014 SPIE. |
| 英文摘要: | This paper presents an approach used to fabricate resonant subwavelength grating based on thiol-ene material. First of all, polydimethylsiloxane soft imprint stamp with opposite structure of the subwavelength grating master mold is made by casting. Then, the desired subwavelength grating with UV-curable thiol-ene material grating structure is fabricated using the polydimethylsioxane soft stamp by UV-curable soft-lithography. Here, we fabricate a subwavelength grating with period of 300nm using the approach, which could reflect blue light with wavelength ranging from 448nm to 482nm at a specific angle and presents the excellent resonant characteristic. The experimental results are consistent with the simulation results, demonstrating that the approach proposed in this paper could effectively fabricate the thiol-ene material resonant subwavelength grating structure. The thiol-ene material is a new green UV-curable polymer material, including a number of advantages such as rapid UV-curing in the natural environment, low-cost, high resolution, and regulative performance characteristic. The fabrication technique in this paper is simple, low-cost, and easy to high throughput, which has broad application prospects in the preparation of micro and nano structures. © 2014 SPIE. |
| 收录类别: | Ei
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| 语种: | 英语
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| 卷号: | 9283
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| ISSN号: | 0277786X
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| 文章类型: | 会议论文
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| 页码: | 92830R
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| Citation statistics: |
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7666
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| Appears in Collections: | 微电子装备总体研究室（四室）_会议论文
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| 2014-2103.pdf（453KB） | 会议论文 | -- | 限制开放 | | View
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作者单位: | Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
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| Recommended Citation: | |
Zhang, Man,Deng, Qiling,Shi, Lifang,et al. Fabrication of resonant subwavelength grating based on thiol-ene[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems. 2014.
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