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题名:
Intelligent control system based on ARM for lithography tool
作者: Chen, Changlong1,2; Tang, Xiaoping1; Hu, Song1; Wang, Nan1,2
出版日期: 2014
会议名称: Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems
会议日期: 2014
学科分类: ARM processors - Complex networks - Computer control - Control systems - Design - Embedded systems - Human computer interaction - Intelligent control - Liquid crystal displays - Lithography - Manufacture - Optical devices - Program debugging - Remote control - Touch screens
DOI: 10.1117/12.2068565
中文摘要: The control system of traditional lithography tool is based on PC and MCU. The PC handles the complex algorithm, human-computer interaction, and communicates with MCU via serial port; The MCU controls motors and electromagnetic valves, etc. This mode has shortcomings like big volume, high power consumption, and wasting of PC resource. In this paper, an embedded intelligent control system of lithography tool, based on ARM, is provided. The control system used S5PV210 as processor, completing the functions of PC in traditional lithography tool, and provided a good human-computer interaction by using LCD and capacitive touch screen. Using Android4.0.3 as operating system, the equipment provided a cool and easy UI which made the control more user-friendly, and implemented remote control and debug, pushing video information of product by network programming. As a result, it's convenient for equipment vendor to provide technical support for users. Finally, compared with traditional lithography tool, this design reduced the PC part, making the hardware resources efficiently used and reducing the cost and volume. Introducing embedded OS and the concepts in "The Internet of things" into the design of lithography tool can be a development trend. © 2014 SPIE.
英文摘要: The control system of traditional lithography tool is based on PC and MCU. The PC handles the complex algorithm, human-computer interaction, and communicates with MCU via serial port; The MCU controls motors and electromagnetic valves, etc. This mode has shortcomings like big volume, high power consumption, and wasting of PC resource. In this paper, an embedded intelligent control system of lithography tool, based on ARM, is provided. The control system used S5PV210 as processor, completing the functions of PC in traditional lithography tool, and provided a good human-computer interaction by using LCD and capacitive touch screen. Using Android4.0.3 as operating system, the equipment provided a cool and easy UI which made the control more user-friendly, and implemented remote control and debug, pushing video information of product by network programming. As a result, it's convenient for equipment vendor to provide technical support for users. Finally, compared with traditional lithography tool, this design reduced the PC part, making the hardware resources efficiently used and reducing the cost and volume. Introducing embedded OS and the concepts in "The Internet of things" into the design of lithography tool can be a development trend. © 2014 SPIE.
收录类别: Ei
语种: 英语
卷号: 9283
ISSN号: 0277786X
文章类型: 会议论文
页码: 92830K
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7665
Appears in Collections:微电子装备总体研究室(四室)_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Science, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China

Recommended Citation:
Chen, Changlong,Tang, Xiaoping,Hu, Song,et al. Intelligent control system based on ARM for lithography tool[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems. 2014.
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