IOE OpenIR  > 微电子装备总体研究室(四室)
Fabrication of optical elements using a rapid UV-curable and low-viscosity polymer material
Zhang, Man1; Li, Zhiwei1; Dong, Xiaochun1; Shi, Lifang1; Deng, Qiling1; Du, Chunlei2; Li, Z. (lzw@ioe.ac.cn)
Volume8759
Pages875926
2013
Language英语
ISSN0277786X
DOI10.1117/12.2014583
Indexed ByEi
Subtype会议论文
AbstractPolymer optical elements have widely been investigated because of their low cost and simple fabrication. Currently, UV-curable epoxy resins have been become general polymer materials for optical elements. However, they are still limited by their intrinsic properties, such as a relatively low rate of polymerization and high formulation viscosity. This paper proposed and demonstrated a rapid UV-curable process for polymer optical elements fabrication based on a UV-curable and low-viscosity thiol-ene composition. Several optical elements, including one-dimensional gratings with a 10-um period, Dammann Gratings and microlens arrays (100μm lens diameter), were fabricated by the UV-curable thiol-ene composition and their optical properties were examined in detail. © 2013 SPIE.; Polymer optical elements have widely been investigated because of their low cost and simple fabrication. Currently, UV-curable epoxy resins have been become general polymer materials for optical elements. However, they are still limited by their intrinsic properties, such as a relatively low rate of polymerization and high formulation viscosity. This paper proposed and demonstrated a rapid UV-curable process for polymer optical elements fabrication based on a UV-curable and low-viscosity thiol-ene composition. Several optical elements, including one-dimensional gratings with a 10-um period, Dammann Gratings and microlens arrays (100μm lens diameter), were fabricated by the UV-curable thiol-ene composition and their optical properties were examined in detail. © 2013 SPIE.
Conference NameProceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation
Conference Date2013
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7659
Collection微电子装备总体研究室(四室)
Corresponding AuthorLi, Z. (lzw@ioe.ac.cn)
Affiliation1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 401122, China
Recommended Citation
GB/T 7714
Zhang, Man,Li, Zhiwei,Dong, Xiaochun,et al. Fabrication of optical elements using a rapid UV-curable and low-viscosity polymer material[C],2013:875926.
Files in This Item:
File Name/Size DocType Version Access License
2013-2084.pdf(292KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zhang, Man]'s Articles
[Li, Zhiwei]'s Articles
[Dong, Xiaochun]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zhang, Man]'s Articles
[Li, Zhiwei]'s Articles
[Dong, Xiaochun]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zhang, Man]'s Articles
[Li, Zhiwei]'s Articles
[Dong, Xiaochun]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.