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题名:
Fabrication of optical elements using a rapid UV-curable and low-viscosity polymer material
作者: Zhang, Man1; Li, Zhiwei1; Dong, Xiaochun1; Shi, Lifang1; Deng, Qiling1; Du, Chunlei2
出版日期: 2013
会议名称: Proceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation
会议日期: 2013
学科分类: Curing - Epoxy resins - Fabrication - Measurements - Microoptics - Optical properties - Precision engineering - Viscosity
DOI: 10.1117/12.2014583
通讯作者: Li, Z. (lzw@ioe.ac.cn)
中文摘要: Polymer optical elements have widely been investigated because of their low cost and simple fabrication. Currently, UV-curable epoxy resins have been become general polymer materials for optical elements. However, they are still limited by their intrinsic properties, such as a relatively low rate of polymerization and high formulation viscosity. This paper proposed and demonstrated a rapid UV-curable process for polymer optical elements fabrication based on a UV-curable and low-viscosity thiol-ene composition. Several optical elements, including one-dimensional gratings with a 10-um period, Dammann Gratings and microlens arrays (100μm lens diameter), were fabricated by the UV-curable thiol-ene composition and their optical properties were examined in detail. © 2013 SPIE.
英文摘要: Polymer optical elements have widely been investigated because of their low cost and simple fabrication. Currently, UV-curable epoxy resins have been become general polymer materials for optical elements. However, they are still limited by their intrinsic properties, such as a relatively low rate of polymerization and high formulation viscosity. This paper proposed and demonstrated a rapid UV-curable process for polymer optical elements fabrication based on a UV-curable and low-viscosity thiol-ene composition. Several optical elements, including one-dimensional gratings with a 10-um period, Dammann Gratings and microlens arrays (100μm lens diameter), were fabricated by the UV-curable thiol-ene composition and their optical properties were examined in detail. © 2013 SPIE.
收录类别: Ei
语种: 英语
卷号: 8759
ISSN号: 0277786X
文章类型: 会议论文
页码: 875926
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7659
Appears in Collections:微电子装备总体研究室(四室)_会议论文

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作者单位: 1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 401122, China

Recommended Citation:
Zhang, Man,Li, Zhiwei,Dong, Xiaochun,et al. Fabrication of optical elements using a rapid UV-curable and low-viscosity polymer material[C]. 见:Proceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation. 2013.
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