Fabrication of optical elements using a rapid UV-curable and low-viscosity polymer material | |
Zhang, Man1; Li, Zhiwei1; Dong, Xiaochun1; Shi, Lifang1; Deng, Qiling1; Du, Chunlei2; Li, Z. (lzw@ioe.ac.cn) | |
Volume | 8759 |
Pages | 875926 |
2013 | |
Language | 英语 |
ISSN | 0277786X |
DOI | 10.1117/12.2014583 |
Indexed By | Ei |
Subtype | 会议论文 |
Abstract | Polymer optical elements have widely been investigated because of their low cost and simple fabrication. Currently, UV-curable epoxy resins have been become general polymer materials for optical elements. However, they are still limited by their intrinsic properties, such as a relatively low rate of polymerization and high formulation viscosity. This paper proposed and demonstrated a rapid UV-curable process for polymer optical elements fabrication based on a UV-curable and low-viscosity thiol-ene composition. Several optical elements, including one-dimensional gratings with a 10-um period, Dammann Gratings and microlens arrays (100μm lens diameter), were fabricated by the UV-curable thiol-ene composition and their optical properties were examined in detail. © 2013 SPIE.; Polymer optical elements have widely been investigated because of their low cost and simple fabrication. Currently, UV-curable epoxy resins have been become general polymer materials for optical elements. However, they are still limited by their intrinsic properties, such as a relatively low rate of polymerization and high formulation viscosity. This paper proposed and demonstrated a rapid UV-curable process for polymer optical elements fabrication based on a UV-curable and low-viscosity thiol-ene composition. Several optical elements, including one-dimensional gratings with a 10-um period, Dammann Gratings and microlens arrays (100μm lens diameter), were fabricated by the UV-curable thiol-ene composition and their optical properties were examined in detail. © 2013 SPIE. |
Conference Name | Proceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation |
Conference Date | 2013 |
Citation statistics | |
Document Type | 会议论文 |
Identifier | http://ir.ioe.ac.cn/handle/181551/7659 |
Collection | 微电子装备总体研究室(四室) |
Corresponding Author | Li, Z. (lzw@ioe.ac.cn) |
Affiliation | 1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 401122, China |
Recommended Citation GB/T 7714 | Zhang, Man,Li, Zhiwei,Dong, Xiaochun,et al. Fabrication of optical elements using a rapid UV-curable and low-viscosity polymer material[C],2013:875926. |
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2013-2084.pdf(292KB) | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text |
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