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题名:
Optical super resolution technology and its application
作者: Nan, Wang1,2; Wei, Jiang1; Wei, Yan1; Song, Hu1
出版日期: 2013
会议名称: 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings
会议日期: 2013
学科分类: Information technology - Manufacture - Optical data storage
DOI: 10.1109/3M-NANO.2013.6737447
中文摘要: With the further development of information technology, optical super resolution technology has become one of the hottest topics of current research, whose importance is self-evident. This paper analyses the definition and implementation method of optical super resolution technology in detail. Then it illustrates two areas which are widely used (optical data storage and lithographic), and presents some typical applications and the latest achievements in scientific research. © 2013 IEEE.
英文摘要: With the further development of information technology, optical super resolution technology has become one of the hottest topics of current research, whose importance is self-evident. This paper analyses the definition and implementation method of optical super resolution technology in detail. Then it illustrates two areas which are widely used (optical data storage and lithographic), and presents some typical applications and the latest achievements in scientific research. © 2013 IEEE.
收录类别: Ei
语种: 英语
文章类型: 会议论文
页码: 347-352
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7656
Appears in Collections:微电子装备总体研究室(四室)_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. University of Chinese Academy of Sciences, Beijing, 100039, China

Recommended Citation:
Nan, Wang,Wei, Jiang,Wei, Yan,et al. Optical super resolution technology and its application[C]. 见:2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings. 2013.
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