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Optical super resolution technology and its application
Nan, Wang1,2; Wei, Jiang1; Wei, Yan1; Song, Hu1
Pages347-352
2013
Language英语
DOI10.1109/3M-NANO.2013.6737447
Indexed ByEi
Subtype会议论文
AbstractWith the further development of information technology, optical super resolution technology has become one of the hottest topics of current research, whose importance is self-evident. This paper analyses the definition and implementation method of optical super resolution technology in detail. Then it illustrates two areas which are widely used (optical data storage and lithographic), and presents some typical applications and the latest achievements in scientific research. © 2013 IEEE.; With the further development of information technology, optical super resolution technology has become one of the hottest topics of current research, whose importance is self-evident. This paper analyses the definition and implementation method of optical super resolution technology in detail. Then it illustrates two areas which are widely used (optical data storage and lithographic), and presents some typical applications and the latest achievements in scientific research. © 2013 IEEE.
Conference Name2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings
Conference Date2013
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7656
Collection微电子装备总体研究室(四室)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. University of Chinese Academy of Sciences, Beijing, 100039, China
Recommended Citation
GB/T 7714
Nan, Wang,Wei, Jiang,Wei, Yan,et al. Optical super resolution technology and its application[C],2013:347-352.
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