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题名:
A research of a high precision multi-channel data acquisition system
作者: Zhong, Ling-Na1,2; Tang, Xiao-Ping1; Yan, Wei1
出版日期: 2013
会议名称: Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications
会议日期: 2013
学科分类: Analog to digital conversion - Data acquisition - Signal detection
DOI: 10.1117/12.2034355
中文摘要: The output signals of the focusing system in lithography are analog. To convert the analog signals into digital ones which are more flexible and stable to process, a desirable data acquisition system is required. The resolution of data acquisition, to some extent, affects the accuracy of focusing. In this article, we first compared performance between the various kinds of analog-to-digital converters (ADC) available on the market at the moment. Combined with the specific requirements (sampling frequency, converting accuracy, numbers of channels etc) and the characteristics (polarization, amplitude range etc) of the analog signals, the model of the ADC to be used as the core chip in our hardware design was determined. On this basis, we chose other chips needed in the hardware circuit that would well match with ADC, then the overall hardware design was obtained. Validation of our data acquisition system was verified through experiments and it can be demonstrated that the system can effectively realize the high resolution conversion of the multi-channel analog signals and give the accurate focusing information in lithography. © 2013 SPIE.
英文摘要: The output signals of the focusing system in lithography are analog. To convert the analog signals into digital ones which are more flexible and stable to process, a desirable data acquisition system is required. The resolution of data acquisition, to some extent, affects the accuracy of focusing. In this article, we first compared performance between the various kinds of analog-to-digital converters (ADC) available on the market at the moment. Combined with the specific requirements (sampling frequency, converting accuracy, numbers of channels etc) and the characteristics (polarization, amplitude range etc) of the analog signals, the model of the ADC to be used as the core chip in our hardware design was determined. On this basis, we chose other chips needed in the hardware circuit that would well match with ADC, then the overall hardware design was obtained. Validation of our data acquisition system was verified through experiments and it can be demonstrated that the system can effectively realize the high resolution conversion of the multi-channel analog signals and give the accurate focusing information in lithography. © 2013 SPIE.
收录类别: Ei
语种: 英语
卷号: 8911
ISSN号: 0277786X
文章类型: 会议论文
页码: 89110I
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7655
Appears in Collections:微电子装备总体研究室(四室)_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Zhong, Ling-Na,Tang, Xiao-Ping,Yan, Wei. A research of a high precision multi-channel data acquisition system[C]. 见:Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications. 2013.
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