| 题名: | A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity |
| 作者: | Li, Shuhong1; Shi, Lifang2; Yang, Zheng1; Huang, Xia1; Zhang, Zhiyou1; Gao, Fuhua1; Guo, Yongkang1; Yu, Weixing3; Du, Jinglei1
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| 出版日期: | 2012
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| 会议名称: | 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
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| 会议日期: | 2012
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| DOI: | 10.1109/NANO.2012.6322023
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| 通讯作者: | Li, S. (lsh2772@yahoo.com.cn)
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| 中文摘要: | To improve the fidelity of nanostructures in transfer process, a composite stamp with reasonable hardness distribution in 184 PDMS used to nanoimprint was studied. The stamp is composed of a stiff 184 PDMS structured layer and a soft 184 PDMS supporter layer. We studied the relationship between the hardness of the 184 PDMS and the proportion of each component in 184 PDMS. The appropriate components proportions of prepolymer and curing agent corresponding to the different region of the composite stamp were presented. The fabrication method of the stamp is also presented. Corresponding experiments were carried out by using this stamp. Kinds of nanostructures were transferred in one inch diameter area with good fidelity. The feature sizes of the structures were less than 100 nm. © 2012 IEEE. |
| 英文摘要: | To improve the fidelity of nanostructures in transfer process, a composite stamp with reasonable hardness distribution in 184 PDMS used to nanoimprint was studied. The stamp is composed of a stiff 184 PDMS structured layer and a soft 184 PDMS supporter layer. We studied the relationship between the hardness of the 184 PDMS and the proportion of each component in 184 PDMS. The appropriate components proportions of prepolymer and curing agent corresponding to the different region of the composite stamp were presented. The fabrication method of the stamp is also presented. Corresponding experiments were carried out by using this stamp. Kinds of nanostructures were transferred in one inch diameter area with good fidelity. The feature sizes of the structures were less than 100 nm. © 2012 IEEE. |
| 收录类别: | Ei
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| 语种: | 英语
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| ISSN号: | 19449399
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| 文章类型: | 会议论文
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| 页码: | 6322023
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| Citation statistics: |
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7651
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| Appears in Collections: | 微电子装备总体研究室（四室）_会议论文
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作者单位: | 1. School of Physics, Sichuan University, Chengdu 610064, China
2. Institute of Optics and Electronics, CAS, P.O. Box 350, Chengdu 610209, China
3. Changchun Institute of Optics, Fine Mechanics and Physics, CAS, Changchun 130033, China
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| Recommended Citation: | |
Li, Shuhong,Shi, Lifang,Yang, Zheng,et al. A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity[C]. 见:2012 12th IEEE International Conference on Nanotechnology, NANO 2012. 2012.
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