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A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity
Li, Shuhong1; Shi, Lifang2; Yang, Zheng1; Huang, Xia1; Zhang, Zhiyou1; Gao, Fuhua1; Guo, Yongkang1; Yu, Weixing3; Du, Jinglei1; Li, S. (lsh2772@yahoo.com.cn)
Pages6322023
2012
Language英语
ISSN19449399
DOI10.1109/NANO.2012.6322023
Indexed ByEi
Subtype会议论文
AbstractTo improve the fidelity of nanostructures in transfer process, a composite stamp with reasonable hardness distribution in 184 PDMS used to nanoimprint was studied. The stamp is composed of a stiff 184 PDMS structured layer and a soft 184 PDMS supporter layer. We studied the relationship between the hardness of the 184 PDMS and the proportion of each component in 184 PDMS. The appropriate components proportions of prepolymer and curing agent corresponding to the different region of the composite stamp were presented. The fabrication method of the stamp is also presented. Corresponding experiments were carried out by using this stamp. Kinds of nanostructures were transferred in one inch diameter area with good fidelity. The feature sizes of the structures were less than 100 nm. © 2012 IEEE.; To improve the fidelity of nanostructures in transfer process, a composite stamp with reasonable hardness distribution in 184 PDMS used to nanoimprint was studied. The stamp is composed of a stiff 184 PDMS structured layer and a soft 184 PDMS supporter layer. We studied the relationship between the hardness of the 184 PDMS and the proportion of each component in 184 PDMS. The appropriate components proportions of prepolymer and curing agent corresponding to the different region of the composite stamp were presented. The fabrication method of the stamp is also presented. Corresponding experiments were carried out by using this stamp. Kinds of nanostructures were transferred in one inch diameter area with good fidelity. The feature sizes of the structures were less than 100 nm. © 2012 IEEE.
Conference Name2012 12th IEEE International Conference on Nanotechnology, NANO 2012
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7651
Collection微电子装备总体研究室(四室)
Corresponding AuthorLi, S. (lsh2772@yahoo.com.cn)
Affiliation1. School of Physics, Sichuan University, Chengdu 610064, China
2. Institute of Optics and Electronics, CAS, P.O. Box 350, Chengdu 610209, China
3. Changchun Institute of Optics, Fine Mechanics and Physics, CAS, Changchun 130033, China
Recommended Citation
GB/T 7714
Li, Shuhong,Shi, Lifang,Yang, Zheng,et al. A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity[C],2012:6322023.
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