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题名:
Research of communication mechanism based USB in wafer stage of lithography
作者: Sheng, Zhuang1,2; Tang, Xiaoping1; Li, Jinlong1,2
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
会议日期: 2012
DOI: 10.1117/12.973654
通讯作者: Sheng, Z. (szz0000@126.com)
中文摘要: Lithography occupies an important position in the development of integrated circuits. As a core component - the wafer stage is a high accuracy, real-time and large travel control important equipment, which has a significant impact on lithography alignment accuracy and exposure quality. The complexity of the wafer stage control and the real-time feedback of synchronization errors are the practical needs in high quality communication. As a general-purpose communication device - USB in various fields has a wide application, and its reliability has been sufficiently validated. In this paper, USB is used as data transmission device to achieve entire communication process. Grating data in FPGA is processed and transferred into host computer, and then it is used to do error analysis. Meanwhile the feedback of grating data from FPGA is aimed to promote the stage orientation precision. The host computer transfers data and custom command through USB to monitor the state of stage motion and guarantees the high-precision control. © 2012 SPIE.
英文摘要: Lithography occupies an important position in the development of integrated circuits. As a core component - the wafer stage is a high accuracy, real-time and large travel control important equipment, which has a significant impact on lithography alignment accuracy and exposure quality. The complexity of the wafer stage control and the real-time feedback of synchronization errors are the practical needs in high quality communication. As a general-purpose communication device - USB in various fields has a wide application, and its reliability has been sufficiently validated. In this paper, USB is used as data transmission device to achieve entire communication process. Grating data in FPGA is processed and transferred into host computer, and then it is used to do error analysis. Meanwhile the feedback of grating data from FPGA is aimed to promote the stage orientation precision. The host computer transfers data and custom command through USB to monitor the state of stage motion and guarantees the high-precision control. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8418
ISSN号: 0277786X
文章类型: 会议论文
页码: 841818
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7644
Appears in Collections:微电子装备总体研究室(四室)_会议论文

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作者单位: 1. Institution of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Sheng, Zhuang,Tang, Xiaoping,Li, Jinlong. Research of communication mechanism based USB in wafer stage of lithography[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems. 2012.
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