| Research of communication mechanism based USB in wafer stage of lithography | |
| Sheng, Zhuang1,2; Tang, Xiaoping1; Li, Jinlong1,2; Sheng, Z. (szz0000@126.com) | |
| Volume | 8418 |
| Pages | 841818 |
| 2012 | |
| Language | 英语 |
| ISSN | 0277786X |
| DOI | 10.1117/12.973654 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | Lithography occupies an important position in the development of integrated circuits. As a core component - the wafer stage is a high accuracy, real-time and large travel control important equipment, which has a significant impact on lithography alignment accuracy and exposure quality. The complexity of the wafer stage control and the real-time feedback of synchronization errors are the practical needs in high quality communication. As a general-purpose communication device - USB in various fields has a wide application, and its reliability has been sufficiently validated. In this paper, USB is used as data transmission device to achieve entire communication process. Grating data in FPGA is processed and transferred into host computer, and then it is used to do error analysis. Meanwhile the feedback of grating data from FPGA is aimed to promote the stage orientation precision. The host computer transfers data and custom command through USB to monitor the state of stage motion and guarantees the high-precision control. © 2012 SPIE.; Lithography occupies an important position in the development of integrated circuits. As a core component - the wafer stage is a high accuracy, real-time and large travel control important equipment, which has a significant impact on lithography alignment accuracy and exposure quality. The complexity of the wafer stage control and the real-time feedback of synchronization errors are the practical needs in high quality communication. As a general-purpose communication device - USB in various fields has a wide application, and its reliability has been sufficiently validated. In this paper, USB is used as data transmission device to achieve entire communication process. Grating data in FPGA is processed and transferred into host computer, and then it is used to do error analysis. Meanwhile the feedback of grating data from FPGA is aimed to promote the stage orientation precision. The host computer transfers data and custom command through USB to monitor the state of stage motion and guarantees the high-precision control. © 2012 SPIE. |
| Conference Name | Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems |
| Conference Date | 2012 |
| Citation statistics | |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7644 |
| Collection | 微电子装备总体研究室（四室） |
| Corresponding Author | Sheng, Z. (szz0000@126.com) |
| Affiliation | 1. Institution of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China 2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China |
| Recommended Citation GB/T 7714 | Sheng, Zhuang,Tang, Xiaoping,Li, Jinlong,et al. Research of communication mechanism based USB in wafer stage of lithography[C],2012:841818. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2012-2091.pdf（963KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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